Dual-frequency matcher-AURASKY

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Dual-frequency matcher

A radio frequency (RF) matcher is a device used to match the impedance of the load with the impedance of the RF power source, reducing reflected power and maximizing transmitted power. Different matchers are designed to be suitable for single frequencies or multiple frequency bands to meet different application scenarios.

Advantages

Rich combinations of frequency and power

It can be applied to various frequency and power combinations, including 400kHz, 2MHz, 13.56MHz, 27.12MHz, 40.68MHz, and 60MHz, and is widely used in plasma-enhanced chemical vapor deposition (PECVD) and capacitively coupled plasma (CCP) etching.

High isolation of dual-frequency network

It can achieve high isolation between two frequencies, reducing mutual interference between frequencies and reflected power to the front-end RF power supply.

Customizable interface form and appearance dimensions

The customizable output interface can adapt to various needs of the customer's equipment, including standard RF connectors and customized band connectors; and it accepts customer requirements for appearance dimensions based on chamber installation and volume limitations.

Innovation

Dual-frequency synchronous control matching algorithm

Improve the traditional single-frequency matching algorithm to simultaneously process radio frequency signals of two frequencies at high speed. Then, through a control algorithm, achieve synchronous adjustment of the two frequency signals, ensuring fast response and automatic matching adjustment for high-end processes.

Wideband RF sensor

Enables accurate measurement of radio frequency signals with a wide frequency band of 400kHz-60MHz, providing accurate data support for matching control algorithms and real-time monitoring data analysis for the process.

High-reliability interface technology

It can simultaneously meet the process applications of high-power and low-power ranges.

Application areas

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor display

Semiconductor lighting

Semiconductor-Microelectromechanical Systems

Power semiconductor

Compound semiconductor

Technical indicators

Power Range	10W-45kW
Frequency Range	400kHz/2MHz/13.56MHz/27.12MHz/40.68MHz/60MHz Dual-Frequency Combination
Matching Speed	≤1s (Suitable Preset) or 3s
Matching Accuracy	≤1% Forward Power or 5W
Signal Type	Continuous Wave, Pulse Wave (SLP/DLP/MLP)
Communication Interface	RS232/EtherCAT
Supply Voltage	24V DC
Cooling Type	Forced Air Cooling
Impedance Range	Customized according to customer needs
Mechanical Dimensions	Customized according to customer needs
Interface Type	Customized according to customer needs
Application Products	Etch, PECVD