• Fluid Control Products

    Fluid Control Products
    Fluid control utilizes various control modules to accurately control key specifications such as fluid flow, pressure and vacuum to meet the specific process needs in the industrial field. With more than 40-Year development on the field of fluid control, AURASKY has developed a series of products such as gas mass flow controllers, pressure controllers,capacitive diaphragm gauges, vacuum switches, pressure sensors, differential pressure pauges, liquid pressure transducers, mixing vaporizers and gas panels. These products play a vital role in many fields such as IC, photovoltaics, vacuum coating and scientific research.

    • Gas Flow Measurement & Control

      Gas Flow Measurement & Control
      Gas Mass Flow Controller (MFC) is a device used for precise measurement and control of gas flow. Since developing its first analog gas mass flow controller in 1979, AURASKY has continuously iterated and innovated, optimizing performance to successively launch thermal based digital gas mass flow controllers and pressure based digital gas mass flow controllers. These products offer advantages such as high precision, high reliability, low zero drift, corrosion resistance and rapid response. Currently, the product range encompasses over 100 types, making them one of the indispensable core components in high-end manufacturing fields.

    • Vacuum Measurement & Control

      Vacuum Measurement & Control
      AURASKY based on its advanced R&D experience in gas mass flow controllers,has continuously expanded its product portfolio to include precision control components such as gas pressure controllers, capacitive diaphragm gauges, pressure transmitters, vacuum pressure switches, butterfly valves, and pendulum valves. These products feature high accuracy, high stability, fast response, and high repeatability, providing stable pressure control solutions for high-end manufacturing fields to ensure process stability and consistency.

    • Liquid Flow Measurement & Control

      Liquid Flow Measurement & Control
      AURASKY offers a comprehensive range of liquid control products, covering liquid pressure measurement, flow rate monitoring, and liquid level sensing. Our portfolio includes liquid pressure transducer,liquid heaters, liquid flow controllers, mixing vaporizer, and steam filters. Boasting high accuracy, exceptional stability, rapid response, and excellent repeatability, these solutions deliver reliable liquid control for the high-end integrated circuit industry.

    • Gas Panel

      Gas Panel
      Gas Mass Flow Controller (MFC) is a device used for precise measurement and control of gas flow. Since developing its first analog gas mass flow controller in 1979, AURASKY has continuously iterated and innovated, optimizing performance to successively launch thermal based digital gas mass flow controllers and pressure based digital gas mass flow controllers. These products offer advantages such as high precision, high reliability, low zero drift, corrosion resistance and rapid response. Currently, the product range encompasses over 100 types, making them one of the indispensable core components in high-end manufacturing fields.

  • RF Control Products

    RF Control Products
    Plasma control is typically achieved by adjusting the type and concentration of the activating gas, and controlling the radio frequency power and gas pressure to precisely control plasma parameters, including plasma density, temperature, and composition. Huacheng Electronics has devoted itself to the research of plasma control, and has mastered ICP (Inductively Coupled Plasma) and CCP (Capacitively Coupled Plasma) technologies. Currently, the mass production of pulse radio frequency power supplies has been achieved, and multiple single-frequency/dual-frequency digital matchers have successfully passed 14nm production line verification and achieved mass production. ESC DC power supplies have been successfully applied in etching and thin film deposition equipment in the integrated circuit field.

    • RF Generator

      RF Generator
      The RF Generator is a power supply device capable of generating sinusoidal waves at specific frequencies. Its core function involves converting facility-level electrical energy into high-frequency electrical energy through integrated circuit systems, including DC power supply units, RF power units, measurement modules, control modules, and communication interfaces. The output power and frequency can be accurately controlled.

    • Match

      Match
      The Match is designed to align the impedance between the RF Generator and the plasma chamber, ensuring maximum RF power transfer to the chamber. It can be customized for specific application scenarios, delivering rapid, accurate, and stable impedance matching across Variable frequencies and power ranges.

    • DC / LF Power Supply

      DC / LF Power Supply
      The DC/LF Power Supply is a device that converts alternating current (AC) or other forms of energy into direct current (DC) or low-frequency (LF) electrical energy through energy conversion mechanisms. The ESC DC Power Supply is a high-voltage product specifically designed for semiconductor applications. It is compatible with unipolar/bipolar and Coulomb-type/- JR-type electrostatic chucks (ESC), providing a stable electrostatic field for wafer adsorption. The RPS (Remote Plasma Source) is a high-stability, low-frequency power supply dedicated to semiconductor applications. It is widely used in cleaning process equipment for oxides, nitrides, and other materials, ensuring reliable plasma stability during critical manufacturing steps.

  • Wafer Transfer Products

    Wafer Transfer Products
    Motion control achieves reliable wafer transfer and storage through an intelligent motion control system. High yield control is realized through excellent capacity management, particle control, vibration suppression, and motion path planning technologies. AURASKY's R&D and manufactured wafer transfer products achieve stable atmospheric and vacuum transfer control for single wafers and batches. Currently, the wafer cassette transfer and storage systems, wafer transfer systems, front-end equipment modules, and wafer transfer platforms developed and manufactured have achieved mass production and delivery at multiple clients in the semiconductor and related industries.

    • Wafer box transfer and storage system Stocker

      Wafer box transfer and storage system Stocker
      The stocker equipment for wafer box transfer and storage system is mainly used in the semiconductor field, acting as a buffer for wafer boxes (FOUP) in the vertical furnace production process. The stocker equipment effectively solves the problem of mismatched supply and cycle time between the vertical furnace process and upstream and downstream processes, and it also realizes the fully automatic opening and closing function of wafer boxes (FOUP), avoiding the impact of manual intervention, ensuring the clean environment of the vertical furnace production process, and improving product quality.

    • Wafer Transfer System (WTS)

      Wafer Transfer System (WTS)
      The system interacts with the customer's OHT system to achieve Foup input and output, uses a FOUP robotic arm to transfer and store Foups between different process stages, uses an internal Loadport to open and map Foups, uses WTS to transfer, combine, and separate wafers, uses mapping at three locations to confirm wafer status and compare data, uses a fixed BF to buffer 50P wafers, and uses PTZ to hand off to the cleaning robot. The top EFU maintains a micro-clean environment for the equipment, and the top ion bar removes electrostatic residue from the transport path.

    • Equipment Front-End Module (EFEM)

      Equipment Front-End Module (EFEM)
      EFEM stands for Equipment Front End Module. EFEM equipment seamlessly connects with various semiconductor process equipment (etching, PVD, CVD, cleaning equipment, etc.), ensuring automated wafer transfer and efficient wafer management in a clean environment. EFEM equipment has multiple interlocks to ensure the safety of personnel and equipment during wafer transfer.

    • Wafer Transfer Module (WTM)

      Wafer Transfer Module (WTM)
      Wafer transfer platforms are an indispensable part of semiconductor process equipment. They primarily automate wafer transfer between different modules in cleanroom and vacuum environments. These platforms can quickly switch between atmospheric and vacuum states to meet system process requirements. This equipment is typically customized to meet customer process needs.
  • Fluid Control Products
    Fluid Control Products
    Fluid control utilizes various control modules to accurately control key specifications such as fluid flow, pressure and vacuum to meet the specific process needs in the industrial field. With more than 40-Year development on the field of fluid control, AURASKY has developed a series of products such as gas mass flow controllers, pressure controllers,capacitive diaphragm gauges, vacuum switches, pressure sensors, differential pressure pauges, liquid pressure transducers, mixing vaporizers and gas panels. These products play a vital role in many fields such as IC, photovoltaics, vacuum coating and scientific research.
    • Gas Flow Measurement & Control
      流量测控.png
      Gas Flow Measurement & Control
      Gas Mass Flow Controller (MFC) is a device used for precise measurement and control of gas flow. Since developing its first analog gas mass flow controller in 1979, AURASKY has continuously iterated and innovated, optimizing performance to successively launch thermal based digital gas mass flow controllers and pressure based digital gas mass flow controllers. These products offer advantages such as high precision, high reliability, low zero drift, corrosion resistance and rapid response. Currently, the product range encompasses over 100 types, making them one of the indispensable core components in high-end manufacturing fields.
    • Vacuum Measurement & Control
      压力.png
      Vacuum Measurement & Control
      AURASKY based on its advanced R&D experience in gas mass flow controllers,has continuously expanded its product portfolio to include precision control components such as gas pressure controllers, capacitive diaphragm gauges, pressure transmitters, vacuum pressure switches, butterfly valves, and pendulum valves. These products feature high accuracy, high stability, fast response, and high repeatability, providing stable pressure control solutions for high-end manufacturing fields to ensure process stability and consistency.
    • Liquid Flow Measurement & Control
      液体测控.png
      Liquid Flow Measurement & Control
      AURASKY offers a comprehensive range of liquid control products, covering liquid pressure measurement, flow rate monitoring, and liquid level sensing. Our portfolio includes liquid pressure transducer,liquid heaters, liquid flow controllers, mixing vaporizer, and steam filters. Boasting high accuracy, exceptional stability, rapid response, and excellent repeatability, these solutions deliver reliable liquid control for the high-end integrated circuit industry.
    • Gas Panel
      气路系统.png
      Gas Panel
      Gas Mass Flow Controller (MFC) is a device used for precise measurement and control of gas flow. Since developing its first analog gas mass flow controller in 1979, AURASKY has continuously iterated and innovated, optimizing performance to successively launch thermal based digital gas mass flow controllers and pressure based digital gas mass flow controllers. These products offer advantages such as high precision, high reliability, low zero drift, corrosion resistance and rapid response. Currently, the product range encompasses over 100 types, making them one of the indispensable core components in high-end manufacturing fields.
  • RF Control Products
    RF Control Products
    Plasma control is typically achieved by adjusting the type and concentration of the activating gas, and controlling the radio frequency power and gas pressure to precisely control plasma parameters, including plasma density, temperature, and composition. Huacheng Electronics has devoted itself to the research of plasma control, and has mastered ICP (Inductively Coupled Plasma) and CCP (Capacitively Coupled Plasma) technologies. Currently, the mass production of pulse radio frequency power supplies has been achieved, and multiple single-frequency/dual-frequency digital matchers have successfully passed 14nm production line verification and achieved mass production. ESC DC power supplies have been successfully applied in etching and thin film deposition equipment in the integrated circuit field.
    • RF Generator
      射频电源.png
      RF Generator
      The RF Generator is a power supply device capable of generating sinusoidal waves at specific frequencies. Its core function involves converting facility-level electrical energy into high-frequency electrical energy through integrated circuit systems, including DC power supply units, RF power units, measurement modules, control modules, and communication interfaces. The output power and frequency can be accurately controlled.
    • Match
      匹配器.png
      Match
      The Match is designed to align the impedance between the RF Generator and the plasma chamber, ensuring maximum RF power transfer to the chamber. It can be customized for specific application scenarios, delivering rapid, accurate, and stable impedance matching across Variable frequencies and power ranges.
    • DC / LF Power Supply
      直流电源.png
      DC / LF Power Supply
      The DC/LF Power Supply is a device that converts alternating current (AC) or other forms of energy into direct current (DC) or low-frequency (LF) electrical energy through energy conversion mechanisms. The ESC DC Power Supply is a high-voltage product specifically designed for semiconductor applications. It is compatible with unipolar/bipolar and Coulomb-type/- JR-type electrostatic chucks (ESC), providing a stable electrostatic field for wafer adsorption. The RPS (Remote Plasma Source) is a high-stability, low-frequency power supply dedicated to semiconductor applications. It is widely used in cleaning process equipment for oxides, nitrides, and other materials, ensuring reliable plasma stability during critical manufacturing steps.
  • Wafer Transfer Products
    Wafer Transfer Products
    Motion control achieves reliable wafer transfer and storage through an intelligent motion control system. High yield control is realized through excellent capacity management, particle control, vibration suppression, and motion path planning technologies. AURASKY's R&D and manufactured wafer transfer products achieve stable atmospheric and vacuum transfer control for single wafers and batches. Currently, the wafer cassette transfer and storage systems, wafer transfer systems, front-end equipment modules, and wafer transfer platforms developed and manufactured have achieved mass production and delivery at multiple clients in the semiconductor and related industries.
    • Wafer box transfer and storage system Stocker
      17c4dcc7-3a15-4c5b-bee4-6e50037b3ebe.png
      Wafer box transfer and storage system Stocker
      The stocker equipment for wafer box transfer and storage system is mainly used in the semiconductor field, acting as a buffer for wafer boxes (FOUP) in the vertical furnace production process. The stocker equipment effectively solves the problem of mismatched supply and cycle time between the vertical furnace process and upstream and downstream processes, and it also realizes the fully automatic opening and closing function of wafer boxes (FOUP), avoiding the impact of manual intervention, ensuring the clean environment of the vertical furnace production process, and improving product quality.
    • Wafer Transfer System (WTS)
      WTS(1735113710877).png
      Wafer Transfer System (WTS)
      The system interacts with the customer's OHT system to achieve Foup input and output, uses a FOUP robotic arm to transfer and store Foups between different process stages, uses an internal Loadport to open and map Foups, uses WTS to transfer, combine, and separate wafers, uses mapping at three locations to confirm wafer status and compare data, uses a fixed BF to buffer 50P wafers, and uses PTZ to hand off to the cleaning robot. The top EFU maintains a micro-clean environment for the equipment, and the top ion bar removes electrostatic residue from the transport path.
    • Equipment Front-End Module (EFEM)
      75d6e7ca-75d8-4d49-98e2-f3775b721fd8-恢复的(1733290909950).png
      Equipment Front-End Module (EFEM)
      EFEM stands for Equipment Front End Module. EFEM equipment seamlessly connects with various semiconductor process equipment (etching, PVD, CVD, cleaning equipment, etc.), ensuring automated wafer transfer and efficient wafer management in a clean environment. EFEM equipment has multiple interlocks to ensure the safety of personnel and equipment during wafer transfer.
    • Wafer Transfer Module (WTM)
      75d6e7ca-75d8-4d49-98e2-f3775b721fd8-恢复的(1733290740256).png
      Wafer Transfer Module (WTM)
      Wafer transfer platforms are an indispensable part of semiconductor process equipment. They primarily automate wafer transfer between different modules in cleanroom and vacuum environments. These platforms can quickly switch between atmospheric and vacuum states to meet system process requirements. This equipment is typically customized to meet customer process needs.

Gas Flow Measurement & Control

CS100 Thermal Digital Gas Mass Flow Controller

CS100 Thermal Digital Gas Mass Flow Controller

Clean Energy - Photovoltaic

Special Industry - Petrochemical Industry

Specialty Industry - Optical Fiber

Special Industry - Vacuum Coating

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

The CS100 product is developed based on the Huacheng Electronics CS series product technology platform. Building upon constant power sensor technology, digital sensor balancing technology, and VCP line control technology, it utilizes a customized design. Customers can select products that meet their specific needs. Its unique Customer Zero-Point Compensation (CGC) function solves the problem of inaccurate MFC precision caused by customer ground wire connections, allowing the product to better adapt to customer environments.
CS200 Thermal Digital Gas Mass Flow Controller

CS200 Thermal Digital Gas Mass Flow Controller

Semiconductor - Integrated Circuit

Semiconductor - Semiconductor Lighting

Clean Energy - Photovoltaic

Clean Energy - Hydrogen Energy

Special Industry - Petrochemical Industry

Specialty Industry - Optical Fiber

Special industry - Vacuum coating

Special Industry - Heat Treatment

Life Science - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Bioengineering

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

The CS200 thermal digital gas mass flow controller uses advanced sensor and temperature compensation technology, so the product accuracy can reach within 1% of the set value, and the low temperature coefficient can ensure that the product adapts to different ambient temperatures. At the same time, the product uses a high-speed control algorithm to make the response time of the entire flow controller more outstanding.
CS210 Thermal Digital Gas Mass Flow Controller

CS210 Thermal Digital Gas Mass Flow Controller

Semiconductor - Semiconductor Lighting

Special Industry - Petrochemical Industry

Specialty Industry - Optical Fiber

Special Industry - Vacuum Coating

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Bioengineering

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

The CS210 thermal digital gas mass flow controller is a digital-analog compatible thermal principle product, widely used in photovoltaic, fuel cell, vacuum and other industries to control gas flow in process manufacturing. It features high accuracy, high stability, and low zero drift.
CS230A Thermal Digital Gas Mass Flow Controller

CS230A Thermal Digital Gas Mass Flow Controller

Clean Energy - Photovoltaic

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

The CS230A product is a high-flow product developed by Hua Cheng Electronics, with a maximum flow rate of up to 300 SLM nitrogen and supporting both digital and analog control modes. The product uses a high-speed control algorithm to significantly improve the response time of the flow meter, with a high-speed response of up to 2 seconds to minimize system errors during use and ensure more accurate flow measurement. The product features low zero drift and low temperature drift, and supports DeviceNet and RS485 communication protocols.
DS312 Pressure Type Gas Mass Flow Controller

DS312 Pressure Type Gas Mass Flow Controller

Semiconductor Integrated Circuit

Semiconductor-MEMS

Power semiconductor

Compound semiconductor

Semiconductor—Advanced Packaging

Semiconductor display

Semiconductor lighting

The DS312 is a high-precision, fast-response mass flow controller (MFC) primarily used in semiconductor equipment such as etchers that demand high machine performance.
D07-7 Thermal Analog Gas Mass Flow Controller

D07-7 Thermal Analog Gas Mass Flow Controller

Special Industry - Petrochemical Industry

Specialty Industry - Optical Fiber

Special Industry - Vacuum Coating

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Bioengineering

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

The D07-7 thermal mass flow controller/meter utilizes the capillary heat transfer differential thermometry principle. It features a set analog range and remains accurate despite temperature and pressure fluctuations, eliminating the need for temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-7 series is a basic product from Huacheng Electronics, characterized by high stability, good repeatability, and ease of maintenance.
D07-9 Thermal Analog Gas Mass Flow Controller

D07-9 Thermal Analog Gas Mass Flow Controller

Clean Energy - Photovoltaic

Clean Energy - Hydrogen Energy

Specialty Industry - Optical Fiber

Special industry - Vacuum Coating

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Bioengineering

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

The D07-9 thermal mass flow controller/flow meter utilizes the capillary heat transfer differential thermometry principle. It features a settable analog range and is not susceptible to fluctuations in temperature and pressure, eliminating the need for temperature and pressure compensation while enabling precise measurement and control of various gases. The D07-9 series is a high-precision, fast-response analog product developed by Hua Cheng Electronics.
D07-11 Thermal Analog Gas Mass Flow Controller

D07-11 Thermal Analog Gas Mass Flow Controller

Special Industry - Petrochemical Industry

Specialty Industry - Optical Fiber

Special industry - Vacuum Coating

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Bioengineering Life

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

The D07-11 thermal mass flow controller/flow meter utilizes the capillary heat transfer differential thermometry principle. It features an analog range and is not affected by temperature and pressure fluctuations, eliminating the need for temperature and pressure compensation to achieve accurate measurement and control of various gases. The D07-11 series is a high-pressure product developed by Huacheng Electronics, with a maximum pressure resistance of 10 MPa.
D07-19J Thermal Analog Gas Mass Flow Controller

D07-19J Thermal Analog Gas Mass Flow Controller

Special Industry—Petrochemical Industry

Special Industry - Optical Fiber

Special Industry - Vacuum Coating

Special Industry - Heat Treatment

Life Science - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Bioengineering

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

The D07-19J thermal based analog gas mass flow controller/flow meter is based on the capillary heat transfer differential thermometry principle. It sets the analog range and will not deviate due to temperature and pressure fluctuations. It does not require temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-19 series products are characterized by high stability and easy maintenance.
D07-23J Thermal Analog Gas Mass Flow Controller

D07-23J Thermal Analog Gas Mass Flow Controller

Clean Energy - Photovoltaic

Clean Energy - Hydrogen Energy

Special Industry - Optical Fiber

Special Industry - Vacuum Coating

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Bioengineering

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

The D07-23J thermal mass flow controller/meter utilizes the capillary heat transfer differential thermometry principle. It features an analog range setting and remains accurate despite fluctuations in temperature and pressure, eliminating the need for temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-23 series is a high-flow analog control product developed and manufactured by Huacheng Electronics. It boasts high accuracy, easy maintenance, and high stability, and supports automatic zero calibration.
D07-60B Thermal Analog Gas Mass Flow Controller

D07-60B Thermal Analog Gas Mass Flow Controller

Clean Energy - Photovoltaic

Clean Energy - Hydrogen Energy

Special Industry - Optical Fiber

Special Industry - Vacuum Coating

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Bioengineering

Life Sciences - Healthcare

Life Sciences - Analytical Instruments

Scientific Research - Experimental Equipment

The D07-60B thermal mass flow controller/flow meter uses the capillary heat transfer differential calorimetry principle. It features an analog range and is not subject to deviations caused by temperature and pressure fluctuations. Precise measurement and control of various gases can be achieved without temperature and pressure compensation. The D07-60 series products are ultra-high flow analog products developed and manufactured by Huacheng Electronics. They support a maximum flow rate of 2000 SLM and feature high stability and easy maintenance.
CS312 Thermal Digital Gas Mass Flow Controller

CS312 Thermal Digital Gas Mass Flow Controller

Semiconductor - Integrated Circuit

Semiconductor - Semiconductor Lighting

Special Industry - vacuum Coating

Scientific Research - Experimental Equipment

The CS312 mass flow controller utilizes a new low zero drift sensor and temperature compensation technology, achieving accuracy within 1% of the set value. Its low temperature coefficient ensures reliable performance across varying environmental temperatures. Designed for precision gas flow control in process equipment within semiconductor, photovoltaic, and flat panel display industries, this device offers exceptional features including minimal zero drift, high accuracy, rapid response, and corrosion resistance.
CS330 Thermal Digital Gas Mass Flow Controller

CS330 Thermal Digital Gas Mass Flow Controller

Semiconductor - Integrated Circuit

Clean Energy - Photovoltaic

Special Industry - Vacuum Coating

Scientific Research - Experimental Equipment

The CS330C/D Series MFC are all-metal sealed, high-flow digital devices providing high accuracy (±0.8% reading) and reliability for gas mass flow control/measurement. Supporting digital signals, 0-5V analog, and 4-20mA analog outputs, they operate with dual power (±8~±16VDC) or single power (+14~+28VDC).
D07-60J Thermal Analog Gas Mass Flow Controller

D07-60J Thermal Analog Gas Mass Flow Controller

Clean Energy - Photovoltaic

Clean Energy - Hydrogen Energy

Specialty Industry - Optical Fiber

Special Industry - Vacuum Coating

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Bioengineering

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

The D07-60J thermal mass flow controller/flow meter uses the principle of capillary heat transfer differential calorimetry. It sets an analog range and does not lose accuracy due to temperature and pressure fluctuations; temperature and pressure compensation are not required to achieve precise measurement and control of various gases. The D07-60 series products are ultra-high flow analog products developed and manufactured by Huacheng Electronics. The maximum flow rate supports 2000 SLM, and it features high stability and easy maintenance. The D07-60J product supports automatic zero calibration.
CS316 Thermal Digital Gas Mass Flow Controller

CS316 Thermal Digital Gas Mass Flow Controller

Semiconductor - Integrated Circuit

Clean Energy - Photovoltaic

The CS316 is a pressure-insensitive mass flow controller specifically designed for critical semiconductor manufacturing processes. It incorporates pressure compensation technology to mitigate the impact of upstream pressure variations on instantaneous flow, ensuring product stability and accuracy. All technical specifications strictly comply with SEMI standards, supporting W-type and C-type IGS gas panel.
Semiconductor
Clean Energy
Vacuum Industries
Life Sciences
Scientific Research
Semiconductor
CS200 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Semiconductor - Semiconductor Lighting
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special industry - Vacuum coating
Special Industry - Heat Treatment
Life Science - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS200 thermal digital gas mass flow controller uses advanced sensor and temperature compensation technology, so the product accuracy can reach within 1% of the set value, and the low temperature coefficient can ensure that the product adapts to different ambient temperatures. At the same time, the product uses a high-speed control algorithm to make the response time of the entire flow controller more outstanding.
CS210 Thermal Digital Gas Mass Flow Controller
Semiconductor - Semiconductor Lighting
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS210 thermal digital gas mass flow controller is a digital-analog compatible thermal principle product, widely used in photovoltaic, fuel cell, vacuum and other industries to control gas flow in process manufacturing. It features high accuracy, high stability, and low zero drift.
DS312 Pressure Type Gas Mass Flow Controller
Semiconductor Integrated Circuit
Semiconductor-MEMS
Power semiconductor
Compound semiconductor
Semiconductor—Advanced Packaging
Semiconductor display
Semiconductor lighting
The DS312 is a high-precision, fast-response mass flow controller (MFC) primarily used in semiconductor equipment such as etchers that demand high machine performance.
CS312 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Semiconductor - Semiconductor Lighting
Special Industry - vacuum Coating
Scientific Research - Experimental Equipment
The CS312 mass flow controller utilizes a new low zero drift sensor and temperature compensation technology, achieving accuracy within 1% of the set value. Its low temperature coefficient ensures reliable performance across varying environmental temperatures. Designed for precision gas flow control in process equipment within semiconductor, photovoltaic, and flat panel display industries, this device offers exceptional features including minimal zero drift, high accuracy, rapid response, and corrosion resistance.
CS330 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Clean Energy - Photovoltaic
Special Industry - Vacuum Coating
Scientific Research - Experimental Equipment
The CS330C/D Series MFC are all-metal sealed, high-flow digital devices providing high accuracy (±0.8% reading) and reliability for gas mass flow control/measurement. Supporting digital signals, 0-5V analog, and 4-20mA analog outputs, they operate with dual power (±8~±16VDC) or single power (+14~+28VDC).
CS316 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Clean Energy - Photovoltaic
The CS316 is a pressure-insensitive mass flow controller specifically designed for critical semiconductor manufacturing processes. It incorporates pressure compensation technology to mitigate the impact of upstream pressure variations on instantaneous flow, ensuring product stability and accuracy. All technical specifications strictly comply with SEMI standards, supporting W-type and C-type IGS gas panel.
Clean Energy
CS100 Thermal Digital Gas Mass Flow Controller
Clean Energy - Photovoltaic
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS100 product is developed based on the Huacheng Electronics CS series product technology platform. Building upon constant power sensor technology, digital sensor balancing technology, and VCP line control technology, it utilizes a customized design. Customers can select products that meet their specific needs. Its unique Customer Zero-Point Compensation (CGC) function solves the problem of inaccurate MFC precision caused by customer ground wire connections, allowing the product to better adapt to customer environments.
CS200 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Semiconductor - Semiconductor Lighting
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special industry - Vacuum coating
Special Industry - Heat Treatment
Life Science - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS200 thermal digital gas mass flow controller uses advanced sensor and temperature compensation technology, so the product accuracy can reach within 1% of the set value, and the low temperature coefficient can ensure that the product adapts to different ambient temperatures. At the same time, the product uses a high-speed control algorithm to make the response time of the entire flow controller more outstanding.
CS230A Thermal Digital Gas Mass Flow Controller
Clean Energy - Photovoltaic
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
The CS230A product is a high-flow product developed by Hua Cheng Electronics, with a maximum flow rate of up to 300 SLM nitrogen and supporting both digital and analog control modes. The product uses a high-speed control algorithm to significantly improve the response time of the flow meter, with a high-speed response of up to 2 seconds to minimize system errors during use and ensure more accurate flow measurement. The product features low zero drift and low temperature drift, and supports DeviceNet and RS485 communication protocols.
D07-9 Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Specialty Industry - Optical Fiber
Special industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-9 thermal mass flow controller/flow meter utilizes the capillary heat transfer differential thermometry principle. It features a settable analog range and is not susceptible to fluctuations in temperature and pressure, eliminating the need for temperature and pressure compensation while enabling precise measurement and control of various gases. The D07-9 series is a high-precision, fast-response analog product developed by Hua Cheng Electronics.
D07-19J Thermal Analog Gas Mass Flow Controller
Special Industry—Petrochemical Industry
Special Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Science - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-19J thermal based analog gas mass flow controller/flow meter is based on the capillary heat transfer differential thermometry principle. It sets the analog range and will not deviate due to temperature and pressure fluctuations. It does not require temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-19 series products are characterized by high stability and easy maintenance.
D07-23J Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-23J thermal mass flow controller/meter utilizes the capillary heat transfer differential thermometry principle. It features an analog range setting and remains accurate despite fluctuations in temperature and pressure, eliminating the need for temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-23 series is a high-flow analog control product developed and manufactured by Huacheng Electronics. It boasts high accuracy, easy maintenance, and high stability, and supports automatic zero calibration.
D07-60B Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Life Sciences - Analytical Instruments
Scientific Research - Experimental Equipment
The D07-60B thermal mass flow controller/flow meter uses the capillary heat transfer differential calorimetry principle. It features an analog range and is not subject to deviations caused by temperature and pressure fluctuations. Precise measurement and control of various gases can be achieved without temperature and pressure compensation. The D07-60 series products are ultra-high flow analog products developed and manufactured by Huacheng Electronics. They support a maximum flow rate of 2000 SLM and feature high stability and easy maintenance.
CS330 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Clean Energy - Photovoltaic
Special Industry - Vacuum Coating
Scientific Research - Experimental Equipment
The CS330C/D Series MFC are all-metal sealed, high-flow digital devices providing high accuracy (±0.8% reading) and reliability for gas mass flow control/measurement. Supporting digital signals, 0-5V analog, and 4-20mA analog outputs, they operate with dual power (±8~±16VDC) or single power (+14~+28VDC).
D07-60J Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-60J thermal mass flow controller/flow meter uses the principle of capillary heat transfer differential calorimetry. It sets an analog range and does not lose accuracy due to temperature and pressure fluctuations; temperature and pressure compensation are not required to achieve precise measurement and control of various gases. The D07-60 series products are ultra-high flow analog products developed and manufactured by Huacheng Electronics. The maximum flow rate supports 2000 SLM, and it features high stability and easy maintenance. The D07-60J product supports automatic zero calibration.
CS316 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Clean Energy - Photovoltaic
The CS316 is a pressure-insensitive mass flow controller specifically designed for critical semiconductor manufacturing processes. It incorporates pressure compensation technology to mitigate the impact of upstream pressure variations on instantaneous flow, ensuring product stability and accuracy. All technical specifications strictly comply with SEMI standards, supporting W-type and C-type IGS gas panel.
Vacuum Industries
CS100 Thermal Digital Gas Mass Flow Controller
Clean Energy - Photovoltaic
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS100 product is developed based on the Huacheng Electronics CS series product technology platform. Building upon constant power sensor technology, digital sensor balancing technology, and VCP line control technology, it utilizes a customized design. Customers can select products that meet their specific needs. Its unique Customer Zero-Point Compensation (CGC) function solves the problem of inaccurate MFC precision caused by customer ground wire connections, allowing the product to better adapt to customer environments.
CS200 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Semiconductor - Semiconductor Lighting
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special industry - Vacuum coating
Special Industry - Heat Treatment
Life Science - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS200 thermal digital gas mass flow controller uses advanced sensor and temperature compensation technology, so the product accuracy can reach within 1% of the set value, and the low temperature coefficient can ensure that the product adapts to different ambient temperatures. At the same time, the product uses a high-speed control algorithm to make the response time of the entire flow controller more outstanding.
CS210 Thermal Digital Gas Mass Flow Controller
Semiconductor - Semiconductor Lighting
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS210 thermal digital gas mass flow controller is a digital-analog compatible thermal principle product, widely used in photovoltaic, fuel cell, vacuum and other industries to control gas flow in process manufacturing. It features high accuracy, high stability, and low zero drift.
CS230A Thermal Digital Gas Mass Flow Controller
Clean Energy - Photovoltaic
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
The CS230A product is a high-flow product developed by Hua Cheng Electronics, with a maximum flow rate of up to 300 SLM nitrogen and supporting both digital and analog control modes. The product uses a high-speed control algorithm to significantly improve the response time of the flow meter, with a high-speed response of up to 2 seconds to minimize system errors during use and ensure more accurate flow measurement. The product features low zero drift and low temperature drift, and supports DeviceNet and RS485 communication protocols.
D07-7 Thermal Analog Gas Mass Flow Controller
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-7 thermal mass flow controller/meter utilizes the capillary heat transfer differential thermometry principle. It features a set analog range and remains accurate despite temperature and pressure fluctuations, eliminating the need for temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-7 series is a basic product from Huacheng Electronics, characterized by high stability, good repeatability, and ease of maintenance.
D07-9 Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Specialty Industry - Optical Fiber
Special industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-9 thermal mass flow controller/flow meter utilizes the capillary heat transfer differential thermometry principle. It features a settable analog range and is not susceptible to fluctuations in temperature and pressure, eliminating the need for temperature and pressure compensation while enabling precise measurement and control of various gases. The D07-9 series is a high-precision, fast-response analog product developed by Hua Cheng Electronics.
D07-11 Thermal Analog Gas Mass Flow Controller
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering Life
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-11 thermal mass flow controller/flow meter utilizes the capillary heat transfer differential thermometry principle. It features an analog range and is not affected by temperature and pressure fluctuations, eliminating the need for temperature and pressure compensation to achieve accurate measurement and control of various gases. The D07-11 series is a high-pressure product developed by Huacheng Electronics, with a maximum pressure resistance of 10 MPa.
D07-19J Thermal Analog Gas Mass Flow Controller
Special Industry—Petrochemical Industry
Special Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Science - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-19J thermal based analog gas mass flow controller/flow meter is based on the capillary heat transfer differential thermometry principle. It sets the analog range and will not deviate due to temperature and pressure fluctuations. It does not require temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-19 series products are characterized by high stability and easy maintenance.
D07-23J Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-23J thermal mass flow controller/meter utilizes the capillary heat transfer differential thermometry principle. It features an analog range setting and remains accurate despite fluctuations in temperature and pressure, eliminating the need for temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-23 series is a high-flow analog control product developed and manufactured by Huacheng Electronics. It boasts high accuracy, easy maintenance, and high stability, and supports automatic zero calibration.
D07-60B Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Life Sciences - Analytical Instruments
Scientific Research - Experimental Equipment
The D07-60B thermal mass flow controller/flow meter uses the capillary heat transfer differential calorimetry principle. It features an analog range and is not subject to deviations caused by temperature and pressure fluctuations. Precise measurement and control of various gases can be achieved without temperature and pressure compensation. The D07-60 series products are ultra-high flow analog products developed and manufactured by Huacheng Electronics. They support a maximum flow rate of 2000 SLM and feature high stability and easy maintenance.
CS312 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Semiconductor - Semiconductor Lighting
Special Industry - vacuum Coating
Scientific Research - Experimental Equipment
The CS312 mass flow controller utilizes a new low zero drift sensor and temperature compensation technology, achieving accuracy within 1% of the set value. Its low temperature coefficient ensures reliable performance across varying environmental temperatures. Designed for precision gas flow control in process equipment within semiconductor, photovoltaic, and flat panel display industries, this device offers exceptional features including minimal zero drift, high accuracy, rapid response, and corrosion resistance.
CS330 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Clean Energy - Photovoltaic
Special Industry - Vacuum Coating
Scientific Research - Experimental Equipment
The CS330C/D Series MFC are all-metal sealed, high-flow digital devices providing high accuracy (±0.8% reading) and reliability for gas mass flow control/measurement. Supporting digital signals, 0-5V analog, and 4-20mA analog outputs, they operate with dual power (±8~±16VDC) or single power (+14~+28VDC).
D07-60J Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-60J thermal mass flow controller/flow meter uses the principle of capillary heat transfer differential calorimetry. It sets an analog range and does not lose accuracy due to temperature and pressure fluctuations; temperature and pressure compensation are not required to achieve precise measurement and control of various gases. The D07-60 series products are ultra-high flow analog products developed and manufactured by Huacheng Electronics. The maximum flow rate supports 2000 SLM, and it features high stability and easy maintenance. The D07-60J product supports automatic zero calibration.
Life Sciences
CS100 Thermal Digital Gas Mass Flow Controller
Clean Energy - Photovoltaic
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS100 product is developed based on the Huacheng Electronics CS series product technology platform. Building upon constant power sensor technology, digital sensor balancing technology, and VCP line control technology, it utilizes a customized design. Customers can select products that meet their specific needs. Its unique Customer Zero-Point Compensation (CGC) function solves the problem of inaccurate MFC precision caused by customer ground wire connections, allowing the product to better adapt to customer environments.
CS200 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Semiconductor - Semiconductor Lighting
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special industry - Vacuum coating
Special Industry - Heat Treatment
Life Science - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS200 thermal digital gas mass flow controller uses advanced sensor and temperature compensation technology, so the product accuracy can reach within 1% of the set value, and the low temperature coefficient can ensure that the product adapts to different ambient temperatures. At the same time, the product uses a high-speed control algorithm to make the response time of the entire flow controller more outstanding.
CS210 Thermal Digital Gas Mass Flow Controller
Semiconductor - Semiconductor Lighting
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS210 thermal digital gas mass flow controller is a digital-analog compatible thermal principle product, widely used in photovoltaic, fuel cell, vacuum and other industries to control gas flow in process manufacturing. It features high accuracy, high stability, and low zero drift.
CS230A Thermal Digital Gas Mass Flow Controller
Clean Energy - Photovoltaic
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
The CS230A product is a high-flow product developed by Hua Cheng Electronics, with a maximum flow rate of up to 300 SLM nitrogen and supporting both digital and analog control modes. The product uses a high-speed control algorithm to significantly improve the response time of the flow meter, with a high-speed response of up to 2 seconds to minimize system errors during use and ensure more accurate flow measurement. The product features low zero drift and low temperature drift, and supports DeviceNet and RS485 communication protocols.
D07-7 Thermal Analog Gas Mass Flow Controller
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-7 thermal mass flow controller/meter utilizes the capillary heat transfer differential thermometry principle. It features a set analog range and remains accurate despite temperature and pressure fluctuations, eliminating the need for temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-7 series is a basic product from Huacheng Electronics, characterized by high stability, good repeatability, and ease of maintenance.
D07-9 Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Specialty Industry - Optical Fiber
Special industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-9 thermal mass flow controller/flow meter utilizes the capillary heat transfer differential thermometry principle. It features a settable analog range and is not susceptible to fluctuations in temperature and pressure, eliminating the need for temperature and pressure compensation while enabling precise measurement and control of various gases. The D07-9 series is a high-precision, fast-response analog product developed by Hua Cheng Electronics.
D07-11 Thermal Analog Gas Mass Flow Controller
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering Life
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-11 thermal mass flow controller/flow meter utilizes the capillary heat transfer differential thermometry principle. It features an analog range and is not affected by temperature and pressure fluctuations, eliminating the need for temperature and pressure compensation to achieve accurate measurement and control of various gases. The D07-11 series is a high-pressure product developed by Huacheng Electronics, with a maximum pressure resistance of 10 MPa.
D07-19J Thermal Analog Gas Mass Flow Controller
Special Industry—Petrochemical Industry
Special Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Science - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-19J thermal based analog gas mass flow controller/flow meter is based on the capillary heat transfer differential thermometry principle. It sets the analog range and will not deviate due to temperature and pressure fluctuations. It does not require temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-19 series products are characterized by high stability and easy maintenance.
D07-23J Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-23J thermal mass flow controller/meter utilizes the capillary heat transfer differential thermometry principle. It features an analog range setting and remains accurate despite fluctuations in temperature and pressure, eliminating the need for temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-23 series is a high-flow analog control product developed and manufactured by Huacheng Electronics. It boasts high accuracy, easy maintenance, and high stability, and supports automatic zero calibration.
D07-60B Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Life Sciences - Analytical Instruments
Scientific Research - Experimental Equipment
The D07-60B thermal mass flow controller/flow meter uses the capillary heat transfer differential calorimetry principle. It features an analog range and is not subject to deviations caused by temperature and pressure fluctuations. Precise measurement and control of various gases can be achieved without temperature and pressure compensation. The D07-60 series products are ultra-high flow analog products developed and manufactured by Huacheng Electronics. They support a maximum flow rate of 2000 SLM and feature high stability and easy maintenance.
D07-60J Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-60J thermal mass flow controller/flow meter uses the principle of capillary heat transfer differential calorimetry. It sets an analog range and does not lose accuracy due to temperature and pressure fluctuations; temperature and pressure compensation are not required to achieve precise measurement and control of various gases. The D07-60 series products are ultra-high flow analog products developed and manufactured by Huacheng Electronics. The maximum flow rate supports 2000 SLM, and it features high stability and easy maintenance. The D07-60J product supports automatic zero calibration.
Scientific Research
CS100 Thermal Digital Gas Mass Flow Controller
Clean Energy - Photovoltaic
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS100 product is developed based on the Huacheng Electronics CS series product technology platform. Building upon constant power sensor technology, digital sensor balancing technology, and VCP line control technology, it utilizes a customized design. Customers can select products that meet their specific needs. Its unique Customer Zero-Point Compensation (CGC) function solves the problem of inaccurate MFC precision caused by customer ground wire connections, allowing the product to better adapt to customer environments.
CS200 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Semiconductor - Semiconductor Lighting
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special industry - Vacuum coating
Special Industry - Heat Treatment
Life Science - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS200 thermal digital gas mass flow controller uses advanced sensor and temperature compensation technology, so the product accuracy can reach within 1% of the set value, and the low temperature coefficient can ensure that the product adapts to different ambient temperatures. At the same time, the product uses a high-speed control algorithm to make the response time of the entire flow controller more outstanding.
CS210 Thermal Digital Gas Mass Flow Controller
Semiconductor - Semiconductor Lighting
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The CS210 thermal digital gas mass flow controller is a digital-analog compatible thermal principle product, widely used in photovoltaic, fuel cell, vacuum and other industries to control gas flow in process manufacturing. It features high accuracy, high stability, and low zero drift.
D07-7 Thermal Analog Gas Mass Flow Controller
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-7 thermal mass flow controller/meter utilizes the capillary heat transfer differential thermometry principle. It features a set analog range and remains accurate despite temperature and pressure fluctuations, eliminating the need for temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-7 series is a basic product from Huacheng Electronics, characterized by high stability, good repeatability, and ease of maintenance.
D07-9 Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Specialty Industry - Optical Fiber
Special industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-9 thermal mass flow controller/flow meter utilizes the capillary heat transfer differential thermometry principle. It features a settable analog range and is not susceptible to fluctuations in temperature and pressure, eliminating the need for temperature and pressure compensation while enabling precise measurement and control of various gases. The D07-9 series is a high-precision, fast-response analog product developed by Hua Cheng Electronics.
D07-11 Thermal Analog Gas Mass Flow Controller
Special Industry - Petrochemical Industry
Specialty Industry - Optical Fiber
Special industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering Life
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-11 thermal mass flow controller/flow meter utilizes the capillary heat transfer differential thermometry principle. It features an analog range and is not affected by temperature and pressure fluctuations, eliminating the need for temperature and pressure compensation to achieve accurate measurement and control of various gases. The D07-11 series is a high-pressure product developed by Huacheng Electronics, with a maximum pressure resistance of 10 MPa.
D07-19J Thermal Analog Gas Mass Flow Controller
Special Industry—Petrochemical Industry
Special Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Science - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-19J thermal based analog gas mass flow controller/flow meter is based on the capillary heat transfer differential thermometry principle. It sets the analog range and will not deviate due to temperature and pressure fluctuations. It does not require temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-19 series products are characterized by high stability and easy maintenance.
D07-23J Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-23J thermal mass flow controller/meter utilizes the capillary heat transfer differential thermometry principle. It features an analog range setting and remains accurate despite fluctuations in temperature and pressure, eliminating the need for temperature and pressure compensation to achieve precise measurement and control of various gases. The D07-23 series is a high-flow analog control product developed and manufactured by Huacheng Electronics. It boasts high accuracy, easy maintenance, and high stability, and supports automatic zero calibration.
D07-60B Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Special Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Life Sciences - Analytical Instruments
Scientific Research - Experimental Equipment
The D07-60B thermal mass flow controller/flow meter uses the capillary heat transfer differential calorimetry principle. It features an analog range and is not subject to deviations caused by temperature and pressure fluctuations. Precise measurement and control of various gases can be achieved without temperature and pressure compensation. The D07-60 series products are ultra-high flow analog products developed and manufactured by Huacheng Electronics. They support a maximum flow rate of 2000 SLM and feature high stability and easy maintenance.
CS312 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Semiconductor - Semiconductor Lighting
Special Industry - vacuum Coating
Scientific Research - Experimental Equipment
The CS312 mass flow controller utilizes a new low zero drift sensor and temperature compensation technology, achieving accuracy within 1% of the set value. Its low temperature coefficient ensures reliable performance across varying environmental temperatures. Designed for precision gas flow control in process equipment within semiconductor, photovoltaic, and flat panel display industries, this device offers exceptional features including minimal zero drift, high accuracy, rapid response, and corrosion resistance.
CS330 Thermal Digital Gas Mass Flow Controller
Semiconductor - Integrated Circuit
Clean Energy - Photovoltaic
Special Industry - Vacuum Coating
Scientific Research - Experimental Equipment
The CS330C/D Series MFC are all-metal sealed, high-flow digital devices providing high accuracy (±0.8% reading) and reliability for gas mass flow control/measurement. Supporting digital signals, 0-5V analog, and 4-20mA analog outputs, they operate with dual power (±8~±16VDC) or single power (+14~+28VDC).
D07-60J Thermal Analog Gas Mass Flow Controller
Clean Energy - Photovoltaic
Clean Energy - Hydrogen Energy
Specialty Industry - Optical Fiber
Special Industry - Vacuum Coating
Special Industry - Heat Treatment
Life Sciences - Environmental Protection
Life Sciences - Food Industry
Life Sciences - Bioengineering
Life Sciences - Healthcare
Scientific Research - Experimental Equipment
The D07-60J thermal mass flow controller/flow meter uses the principle of capillary heat transfer differential calorimetry. It sets an analog range and does not lose accuracy due to temperature and pressure fluctuations; temperature and pressure compensation are not required to achieve precise measurement and control of various gases. The D07-60 series products are ultra-high flow analog products developed and manufactured by Huacheng Electronics. The maximum flow rate supports 2000 SLM, and it features high stability and easy maintenance. The D07-60J product supports automatic zero calibration.

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