CS330 Thermal Digital Gas Mass Flow Controller-AURASKY

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CS330 Thermal Digital Gas Mass Flow Controller

The CS330C/D Series MFC are all-metal sealed, high-flow digital devices providing high accuracy (±0.8% reading) and reliability for gas mass flow control/measurement. Supporting digital signals, 0-5V analog, and 4-20mA analog outputs, they operate with dual power (±8~±16VDC) or single power (+14~+28VDC).

Advantages

Supports Automatic Fault Alarm

Multi-gas, multi-range, etc.

Standard Open Communication Protocols Allow Customers to Develop Their Own Controls

The software provides convenience in data collection.

Provides Powerful and Free Client上位机 software, Digital MFC

All-metal Sealing Technology＆Semi-Level Surface Treatment

The product employs specialized metal surface finishing treatment technology, with all wetted material parts to be made from corrosion resistance 316L, strictly manufactured per SEMI F20 standard.

Innovation

Valve Control Technology of VCP

The valve control technology adopts a number of new achievements, collectively referred to as VCP technology. This structure has a small internal gas dead zone, fast valve response speed, and no hysteresis phenomenon. Using VCP technology can effectively improve the quality of gas mass flow controllers.

Constant Power Sensor

A novel constant-power sensor technology is adopted. This technology uses a method to maintain a constant operating state of the sensor, significantly improving multiple indicators such as system measurement accuracy and response speed.

Digital Sensor Compensation Technology

A digital sensor bridge balancing method is used, which can compensate for the sensor driving voltage with continuous voltage to improve the product sensor's suppression of temperature drift, enabling the product to withstand drastic temperature changes.

Application Areas

Semiconductor - Integrated Circuit

Clean Energy - Photovoltaic

Special Industry - Vacuum Coating

Scientific Research - Experimental Equipment

Specifications

ITEM	CS330
	C		D
Full Scale Range (N₂)	(100,200) SLM
Accuracy	±1.0% S.P.(>35% F.S.) ±0.35% F.S.(≤35% F.S.)
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤1sec
Valve Rest Position	Normally Closed	No Valve	Normally Closed	No Valve
Differential Pressure	400~600KPa	<0.03 MPa	400~600KPa	<0.03 MPa
Temperature Coefficient	Zero:≤±0.02%F.S./℃; Span:≤±0.1% F.S./℃
Max Operating Pressure	0.6 MPa
Max Pressure	1 MPa
Zero Drift	<0.6%F.S. per year without autozero
Leak	5x10⁻¹²Pa·m³/sec He (5x10⁻¹¹atm.cc/sec He)
Seal Materials	Metal
Operating Temperature	(0~50) ℃
Input Signal	Digital: RS485/DeviceNet/ EtherCAT* Analog:(0~5)VDC or(4~20)mA	N/A	Digital: RS485/DeviceNet/EtherCAT* Analog:(0~5)VDC or(4~20)mA	N/A
Output Signal	Digital: RS485 or DeviceNet or EtherCAT Analog:(0~5)VDC or(4~20)mA
Power Supply	±8~±16 VDC or+14~+28 VDC(400mA)
Surface Chemistry	Cr/ Fe ratio>2.0 CrO thickness >20 Angstroms
Fittings	VCR 1/2"M
Electronic Connector	9 pin male sub-D; 15 pin male sub-D;DeviceNet male; EtherCAT* male
Surface Finish	5 μinch Ra		25 μinch Ra
Weight	1.8kg	1.6kg	1.8kg	1.6kg

Related Products

CS312 Thermal Digital Gas Mass Flow Controller

Semiconductor - Integrated Circuit

Semiconductor - Semiconductor Lighting

Special Industry - vacuum Coating

Scientific Research - Experimental Equipment

The CS312 mass flow controller utilizes a new low zero drift sensor and temperature compensation technology, achieving accuracy within 1% of the set value. Its low temperature coefficient ensures reliable performance across varying environmental temperatures. Designed for precision gas flow control in process equipment within semiconductor, photovoltaic, and flat panel display industries, this device offers exceptional features including minimal zero drift, high accuracy, rapid response, and corrosion resistance.

CS316 Thermal Digital Gas Mass Flow Controller

Semiconductor - Integrated Circuit

Clean Energy - Photovoltaic

The CS316 is a pressure-insensitive mass flow controller specifically designed for critical semiconductor manufacturing processes. It incorporates pressure compensation technology to mitigate the impact of upstream pressure variations on instantaneous flow, ensuring product stability and accuracy. All technical specifications strictly comply with SEMI standards, supporting W-type and C-type IGS gas panel.

CS100 Thermal Digital Gas Mass Flow Controller

Clean Energy - Photovoltaic

Special Industry - Petrochemical Industry

Specialty Industry - Optical Fiber

Special Industry - Vacuum Coating

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

The CS100 product is developed based on the Huacheng Electronics CS series product technology platform. Building upon constant power sensor technology, digital sensor balancing technology, and VCP line control technology, it utilizes a customized design. Customers can select products that meet their specific needs. Its unique Customer Zero-Point Compensation (CGC) function solves the problem of inaccurate MFC precision caused by customer ground wire connections, allowing the product to better adapt to customer environments.

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