CS316 Thermal Digital Gas Mass Flow Controller-AURASKY

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CS316 Thermal Digital Gas Mass Flow Controller

The CS316 is a pressure-insensitive mass flow controller specifically designed for critical semiconductor manufacturing processes. It incorporates pressure compensation technology to mitigate the impact of upstream pressure variations on instantaneous flow, ensuring product stability and accuracy. All technical specifications strictly comply with SEMI standards, supporting W-type and C-type IGS gas panel.

Advantages

Low Zero Drift

The novel sensor employs constant-power principle with rapid temperature compensation to maintain thermal equilibrium, effectively suppressing zero drift.

High Precision, Fast Response

Product accuracy employs setpoint precision, achieving ±1% S.P. accuracy with response time ≤0.7 sec.

High Stability

Effective compensation for upstream gas pressure disturbances minimizes flow fluctuations caused by pressure fluctuations, guaranteeing stable and precise flow control.

Semi-Level Surface Treatment

The product employs specialized metal surface finishing treatment technology, with all wetted material parts to be made from corrosion resistance 316L, strictly manufactured per SEMI F20 standard.

Innovation

Electro-Chemical Polishing

Mechanical components undergo electrochemical polishing, achieving average 5μ inch Ra internal surface roughness with exceptional corrosion resistance.

Constant Power Sensing Technology

The symmetrically designed sensor maintains thermal balance between upstream/downstream paths through high-performance insulation materials， effectively inhibiting zero drift phenomena.

Pressure Compensation Technology

Powered by a 32-bit high-frequency MCU, the pressure compensation technology significantly enhances flow calculation and regulation speed. This configuration prevents flow fluctuations during MFC front-end pressure disturbances, enabling stable and precise flow control.

Application Areas

Semiconductor - Integrated Circuit

Clean Energy - Photovoltaic

Specifications

ITEM	CS316
Full Scale Range (N₂)	(0~1,2,3,5,10,20,30,50,100,200,300,500) SCCM (0~1,2,3,5,10,20,30) SLM
Accuracy	±1.0% S.P. (≥35% F.S.) (±0.80% S.P. (≥30% F.S.) optional) ±0.35% F.S. (＜35% F.S.) (±0.24% F.S. (＜30% F.S.) optional)
Leak	≤5×10¹² Pa·m³/s
Response Time	≤0.7 sec
Operating Pressure Differential Range	0.05~0.35MPa flow rate ≤10SLM 0.15~0.35MPa flow rate >10SLM
Temperature Coefficient	Zero point: ≤±0.02%F.S./℃; Adjustment: ≤±0.05%F.S./℃
Repeatability	±0.2%F.S.
Linearity	±0.5%F.S.
Pressure Transient Sensitivity	10~100sccm ±(5%S.P+1%F.S. maximum) [3PSI/sec] 100~10SLM ±(1%S.P+1%F.S. maximum) [5PSI/sec]
Max Pressure	3.5 MPa
Seal Materials	Metal Seal
Operation Temperature	(0~50) ℃
Input Signal	Analog: 0~5V, RS485, DeviceNet
Output Signal	Analog: 0~5V, RS485, DeviceNet
Power Supply	±8~±16 VDC (bipolar) or +14~+28 VDC (unipolar)
Fittings	VCR1/4 male connector; 1.125" C-type sealed connector; 1.125" W-type sealed connector

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The CS200 thermal digital gas mass flow controller uses advanced sensor and temperature compensation technology, so the product accuracy can reach within 1% of the set value, and the low temperature coefficient can ensure that the product adapts to different ambient temperatures. At the same time, the product uses a high-speed control algorithm to make the response time of the entire flow controller more outstanding.

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The CS312 mass flow controller utilizes a new low zero drift sensor and temperature compensation technology, achieving accuracy within 1% of the set value. Its low temperature coefficient ensures reliable performance across varying environmental temperatures. Designed for precision gas flow control in process equipment within semiconductor, photovoltaic, and flat panel display industries, this device offers exceptional features including minimal zero drift, high accuracy, rapid response, and corrosion resistance.

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