CS200 Thermal Digital Gas Mass Flow Controller

The CS200 thermal digital gas mass flow controller uses advanced sensor and temperature compensation technology, so the product accuracy can reach within 1% of the set value, and the low temperature coefficient can ensure that the product adapts to different ambient temperatures. At the same time, the product uses a high-speed control algorithm to make the response time of the entire flow controller more outstanding.

Advantages

High Precision, High Stability

Using signal processing chips with fast conversion rate, low temperature coefficient, strong common-mode rejection ratio, and low power consumption, the product features high precision, high stability, and high anti-interference performance. The accuracy can reach up to ±0.8%S.P.

Low Zero Drift

Low-power sensors using a constant-power principle, combined with software and hardware temperature compensation, achieve low zero drift. Without correction, the zero point ≤0.5% F.S., the temperature coefficient is less than 0.02% F.S./℃ (zero), 0.05% F.S./℃ (span).

Perfect Functions

Features automatic reset, alarm, soft start, delay, etc., and is equipped with powerful free client software.

Innovation

Valve Control Technology of VCP

The valve control technology adopts a number of new achievements, collectively referred to as VCP technology. This structure has a small internal gas dead zone, fast valve response speed, and no hysteresis phenomenon. Using VCP technology can effectively improve the quality of gas mass flow controllers.

Constant Power Sensor

A novel constant-power sensor technology is adopted. This technology uses a method to maintain a constant operating state of the sensor, significantly improving multiple indicators such as system measurement accuracy and response speed.

Digital Sensor Compensation Technology

A digital sensor bridge balancing method is used, which can compensate for the sensor driving voltage with continuous voltage to improve the product sensor's suppression of temperature drift, enabling the product to withstand drastic temperature changes.

Application Areas

Semiconductor - Integrated Circuit

Semiconductor - Semiconductor Lighting

Clean Energy - Photovoltaic

Clean Energy - Hydrogen Energy

Special Industry - Petrochemical Industry

Specialty Industry - Optical Fiber

Special industry - Vacuum coating

Special Industry - Heat Treatment

Life Science - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Bioengineering

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

Specifications

ITEM CS200
Type A C D
Full scale range (N2) (0~5,10,20,30,50,100,200,300,500) SCCM (0~1,2,3,5,10,20,30,50) SLM (0~2,3,5,10,20,30,50,100,200,300,500) SCCM (0~1,2,3,5,10,20,30) SLM
Accuracy ±1.0% S.P.(≥35% F.S.); ±0.35% F.S.(<35% F.S.)
Linearity ±0.5% F.S.
Repeatability ±0.2% F.S.
Response Time ≤ 1 sec ≤0.8 sec(SEMI E17-0600) ≤1 sec
Valve Rest Position Normally Closed or Normally Open N/A Normally Closed or Normally Open N/A Normally Closed or Normally Open N/A
Differential Pressure

(0.05~0.35) MPa (≤10 SLM)

 

(0.1~0.35) MPa 10 SLM

 

(0.2~0.45) MPa 30 SLM

 <0.02 MPa

(0.05~0.35) MPa (≤10 SLM)

 

(0.1~0.35) MPa (>10 SLM)

 <0.02 MPa

(0.05~0.35) MPa (≤10 SLM)

 

(0.1~0.35) MPa (>10 SLM)

 <0.02 MPa
Temperature Coefficient

Zero: ≤±0.05% F.S./℃;

 

Span: ≤±0.1% F.S./℃ Flow ≤30 SLM

 

≤±0.2% F.S./℃ Flow >30 SLM

Zero: ≤±0.02% F.S./℃;

 

Span: ≤±0.05% F.S./℃
Max.Operating Pressure   0.45MPa
Max Pressure 3MPa
Leak  1×10⁻¹⁰ Pa·m³/sec He (1×10⁹ atm·cc/sec He) 1×10⁻¹¹ Pa·m³/sec He (1×10⁻¹⁰ atm·cc/sec He)
Seal Materials Viton Metal Metal
Surface Chemistry ——— Cr/Fe ratio > 2.0; CrO thickness > 20 Angstroms ———
Surface Finish 25 μinch Ra 10 μinch Ra 25 μinch Ra
Operation Temperature (5~45) ℃ (0~50) ℃
Input Signal

Digital: RS485 or DeviceNet or ProfiBus or EtherCAT;

 

Analog: (0~5) VDC

 

or (4~20) mA or (0~20) mA

 N/A

Digital: RS485 or DeviceNet

 

or ProfiBus TK or EtherCAT

;

 

Analog: (0~5) VDC

 

or (4~20) mA or (0~20) mA

 N/A

Digital: RS485 or DeviceNet

 

or ProfiBus

or EtherCAT;

 

Analog: (0~5) VDC

 

or (4~20) mA or (0~20) mA

 N/A
Output Signal Digital: RS485 or DeviceNet or ProfiBus or EtherCAT male; Analog: (0~5) VDC or (4~20) mA or (0~20) mA
Power Supply ±8~±16 VDC or +14~+28 VDC or +20.4~+26.4 VDC (EtherCAT)
Electronic Connector D-sub 9-pin male; D-sub 15-pin male; DeviceNet; ProfiBus or EtherCAT; Analog
Fittings

VCR 1/4" M; VCO 1/4" M; A-seal;

 

Compression Fitting φ10; Compression Fitting φ6;

 

Compression Fitting 3/8"; Compression Fitting 1/4";

 

Compression Fitting 1/8"; Compression Fitting φ3;

 

φ6 (inner) × 1 hose; φ5 (inner) × 1.5 hose; φ4 (inner) × 1 hose

VCR 1/4" M;

 

Compression Fitting φ6;

 

Compression Fitting φ3;

 

Compression Fitting 1/4";

 

W-seal; C-seal
Weight 1kg 0.8kg 1.2kg 1kg 1.2kg 1kg

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