• Fluid Control Products

    Fluid Control Products
    Fluid control utilizes various control modules to accurately control key specifications such as fluid flow, pressure and vacuum to meet the specific process needs in the industrial field. With more than 40-Year development on the field of fluid control, AURASKY has developed a series of products such as gas mass flow controllers, pressure controllers,capacitive diaphragm gauges, vacuum switches, pressure sensors, differential pressure pauges, liquid pressure transducers, mixing vaporizers and gas panels. These products play a vital role in many fields such as IC, photovoltaics, vacuum coating and scientific research.

    • Gas Flow Measurement & Control

      Gas Flow Measurement & Control
      Gas Mass Flow Controller (MFC) is a device used for precise measurement and control of gas flow. Since developing its first analog gas mass flow controller in 1979, AURASKY has continuously iterated and innovated, optimizing performance to successively launch thermal based digital gas mass flow controllers and pressure based digital gas mass flow controllers. These products offer advantages such as high precision, high reliability, low zero drift, corrosion resistance and rapid response. Currently, the product range encompasses over 100 types, making them one of the indispensable core components in high-end manufacturing fields.

    • Vacuum Measurement & Control

      Vacuum Measurement & Control
      AURASKY based on its advanced R&D experience in gas mass flow controllers,has continuously expanded its product portfolio to include precision control components such as gas pressure controllers, capacitive diaphragm gauges, pressure transmitters, vacuum pressure switches, butterfly valves, and pendulum valves. These products feature high accuracy, high stability, fast response, and high repeatability, providing stable pressure control solutions for high-end manufacturing fields to ensure process stability and consistency.

    • Liquid Flow Measurement & Control

      Liquid Flow Measurement & Control
      AURASKY offers a comprehensive range of liquid control products, covering liquid pressure measurement, flow rate monitoring, and liquid level sensing. Our portfolio includes liquid pressure transducer,liquid heaters, liquid flow controllers, mixing vaporizer, and steam filters. Boasting high accuracy, exceptional stability, rapid response, and excellent repeatability, these solutions deliver reliable liquid control for the high-end integrated circuit industry.

    • Gas Panel

      Gas Panel
      Gas Mass Flow Controller (MFC) is a device used for precise measurement and control of gas flow. Since developing its first analog gas mass flow controller in 1979, AURASKY has continuously iterated and innovated, optimizing performance to successively launch thermal based digital gas mass flow controllers and pressure based digital gas mass flow controllers. These products offer advantages such as high precision, high reliability, low zero drift, corrosion resistance and rapid response. Currently, the product range encompasses over 100 types, making them one of the indispensable core components in high-end manufacturing fields.

  • RF Control Products

    RF Control Products
    Plasma control is typically achieved by adjusting the type and concentration of the activating gas, and controlling the radio frequency power and gas pressure to precisely control plasma parameters, including plasma density, temperature, and composition. Huacheng Electronics has devoted itself to the research of plasma control, and has mastered ICP (Inductively Coupled Plasma) and CCP (Capacitively Coupled Plasma) technologies. Currently, the mass production of pulse radio frequency power supplies has been achieved, and multiple single-frequency/dual-frequency digital matchers have successfully passed 14nm production line verification and achieved mass production. ESC DC power supplies have been successfully applied in etching and thin film deposition equipment in the integrated circuit field.

    • RF Generator

      RF Generator
      The RF Generator is a power supply device capable of generating sinusoidal waves at specific frequencies. Its core function involves converting facility-level electrical energy into high-frequency electrical energy through integrated circuit systems, including DC power supply units, RF power units, measurement modules, control modules, and communication interfaces. The output power and frequency can be accurately controlled.

    • Match

      Match
      The Match is designed to align the impedance between the RF Generator and the plasma chamber, ensuring maximum RF power transfer to the chamber. It can be customized for specific application scenarios, delivering rapid, accurate, and stable impedance matching across Variable frequencies and power ranges.

    • DC / LF Power Supply

      DC / LF Power Supply
      The DC/LF Power Supply is a device that converts alternating current (AC) or other forms of energy into direct current (DC) or low-frequency (LF) electrical energy through energy conversion mechanisms. The ESC DC Power Supply is a high-voltage product specifically designed for semiconductor applications. It is compatible with unipolar/bipolar and Coulomb-type/- JR-type electrostatic chucks (ESC), providing a stable electrostatic field for wafer adsorption. The RPS (Remote Plasma Source) is a high-stability, low-frequency power supply dedicated to semiconductor applications. It is widely used in cleaning process equipment for oxides, nitrides, and other materials, ensuring reliable plasma stability during critical manufacturing steps.

  • Wafer Transfer Products

    Wafer Transfer Products
    Motion control achieves reliable wafer transfer and storage through an intelligent motion control system. High yield control is realized through excellent capacity management, particle control, vibration suppression, and motion path planning technologies. AURASKY's R&D and manufactured wafer transfer products achieve stable atmospheric and vacuum transfer control for single wafers and batches. Currently, the wafer cassette transfer and storage systems, wafer transfer systems, front-end equipment modules, and wafer transfer platforms developed and manufactured have achieved mass production and delivery at multiple clients in the semiconductor and related industries.

    • Wafer box transfer and storage system Stocker

      Wafer box transfer and storage system Stocker
      The stocker equipment for wafer box transfer and storage system is mainly used in the semiconductor field, acting as a buffer for wafer boxes (FOUP) in the vertical furnace production process. The stocker equipment effectively solves the problem of mismatched supply and cycle time between the vertical furnace process and upstream and downstream processes, and it also realizes the fully automatic opening and closing function of wafer boxes (FOUP), avoiding the impact of manual intervention, ensuring the clean environment of the vertical furnace production process, and improving product quality.

    • Wafer Transfer System (WTS)

      Wafer Transfer System (WTS)
      The system interacts with the customer's OHT system to achieve Foup input and output, uses a FOUP robotic arm to transfer and store Foups between different process stages, uses an internal Loadport to open and map Foups, uses WTS to transfer, combine, and separate wafers, uses mapping at three locations to confirm wafer status and compare data, uses a fixed BF to buffer 50P wafers, and uses PTZ to hand off to the cleaning robot. The top EFU maintains a micro-clean environment for the equipment, and the top ion bar removes electrostatic residue from the transport path.

    • Equipment Front-End Module (EFEM)

      Equipment Front-End Module (EFEM)
      EFEM stands for Equipment Front End Module. EFEM equipment seamlessly connects with various semiconductor process equipment (etching, PVD, CVD, cleaning equipment, etc.), ensuring automated wafer transfer and efficient wafer management in a clean environment. EFEM equipment has multiple interlocks to ensure the safety of personnel and equipment during wafer transfer.

    • Wafer Transfer Module (WTM)

      Wafer Transfer Module (WTM)
      Wafer transfer platforms are an indispensable part of semiconductor process equipment. They primarily automate wafer transfer between different modules in cleanroom and vacuum environments. These platforms can quickly switch between atmospheric and vacuum states to meet system process requirements. This equipment is typically customized to meet customer process needs.
  • Fluid Control Products
    Fluid Control Products
    Fluid control utilizes various control modules to accurately control key specifications such as fluid flow, pressure and vacuum to meet the specific process needs in the industrial field. With more than 40-Year development on the field of fluid control, AURASKY has developed a series of products such as gas mass flow controllers, pressure controllers,capacitive diaphragm gauges, vacuum switches, pressure sensors, differential pressure pauges, liquid pressure transducers, mixing vaporizers and gas panels. These products play a vital role in many fields such as IC, photovoltaics, vacuum coating and scientific research.
    • Gas Flow Measurement & Control
      流量测控.png
      Gas Flow Measurement & Control
      Gas Mass Flow Controller (MFC) is a device used for precise measurement and control of gas flow. Since developing its first analog gas mass flow controller in 1979, AURASKY has continuously iterated and innovated, optimizing performance to successively launch thermal based digital gas mass flow controllers and pressure based digital gas mass flow controllers. These products offer advantages such as high precision, high reliability, low zero drift, corrosion resistance and rapid response. Currently, the product range encompasses over 100 types, making them one of the indispensable core components in high-end manufacturing fields.
    • Vacuum Measurement & Control
      压力.png
      Vacuum Measurement & Control
      AURASKY based on its advanced R&D experience in gas mass flow controllers,has continuously expanded its product portfolio to include precision control components such as gas pressure controllers, capacitive diaphragm gauges, pressure transmitters, vacuum pressure switches, butterfly valves, and pendulum valves. These products feature high accuracy, high stability, fast response, and high repeatability, providing stable pressure control solutions for high-end manufacturing fields to ensure process stability and consistency.
    • Liquid Flow Measurement & Control
      液体测控.png
      Liquid Flow Measurement & Control
      AURASKY offers a comprehensive range of liquid control products, covering liquid pressure measurement, flow rate monitoring, and liquid level sensing. Our portfolio includes liquid pressure transducer,liquid heaters, liquid flow controllers, mixing vaporizer, and steam filters. Boasting high accuracy, exceptional stability, rapid response, and excellent repeatability, these solutions deliver reliable liquid control for the high-end integrated circuit industry.
    • Gas Panel
      气路系统.png
      Gas Panel
      Gas Mass Flow Controller (MFC) is a device used for precise measurement and control of gas flow. Since developing its first analog gas mass flow controller in 1979, AURASKY has continuously iterated and innovated, optimizing performance to successively launch thermal based digital gas mass flow controllers and pressure based digital gas mass flow controllers. These products offer advantages such as high precision, high reliability, low zero drift, corrosion resistance and rapid response. Currently, the product range encompasses over 100 types, making them one of the indispensable core components in high-end manufacturing fields.
  • RF Control Products
    RF Control Products
    Plasma control is typically achieved by adjusting the type and concentration of the activating gas, and controlling the radio frequency power and gas pressure to precisely control plasma parameters, including plasma density, temperature, and composition. Huacheng Electronics has devoted itself to the research of plasma control, and has mastered ICP (Inductively Coupled Plasma) and CCP (Capacitively Coupled Plasma) technologies. Currently, the mass production of pulse radio frequency power supplies has been achieved, and multiple single-frequency/dual-frequency digital matchers have successfully passed 14nm production line verification and achieved mass production. ESC DC power supplies have been successfully applied in etching and thin film deposition equipment in the integrated circuit field.
    • RF Generator
      射频电源.png
      RF Generator
      The RF Generator is a power supply device capable of generating sinusoidal waves at specific frequencies. Its core function involves converting facility-level electrical energy into high-frequency electrical energy through integrated circuit systems, including DC power supply units, RF power units, measurement modules, control modules, and communication interfaces. The output power and frequency can be accurately controlled.
    • Match
      匹配器.png
      Match
      The Match is designed to align the impedance between the RF Generator and the plasma chamber, ensuring maximum RF power transfer to the chamber. It can be customized for specific application scenarios, delivering rapid, accurate, and stable impedance matching across Variable frequencies and power ranges.
    • DC / LF Power Supply
      直流电源.png
      DC / LF Power Supply
      The DC/LF Power Supply is a device that converts alternating current (AC) or other forms of energy into direct current (DC) or low-frequency (LF) electrical energy through energy conversion mechanisms. The ESC DC Power Supply is a high-voltage product specifically designed for semiconductor applications. It is compatible with unipolar/bipolar and Coulomb-type/- JR-type electrostatic chucks (ESC), providing a stable electrostatic field for wafer adsorption. The RPS (Remote Plasma Source) is a high-stability, low-frequency power supply dedicated to semiconductor applications. It is widely used in cleaning process equipment for oxides, nitrides, and other materials, ensuring reliable plasma stability during critical manufacturing steps.
  • Wafer Transfer Products
    Wafer Transfer Products
    Motion control achieves reliable wafer transfer and storage through an intelligent motion control system. High yield control is realized through excellent capacity management, particle control, vibration suppression, and motion path planning technologies. AURASKY's R&D and manufactured wafer transfer products achieve stable atmospheric and vacuum transfer control for single wafers and batches. Currently, the wafer cassette transfer and storage systems, wafer transfer systems, front-end equipment modules, and wafer transfer platforms developed and manufactured have achieved mass production and delivery at multiple clients in the semiconductor and related industries.
    • Wafer box transfer and storage system Stocker
      17c4dcc7-3a15-4c5b-bee4-6e50037b3ebe.png
      Wafer box transfer and storage system Stocker
      The stocker equipment for wafer box transfer and storage system is mainly used in the semiconductor field, acting as a buffer for wafer boxes (FOUP) in the vertical furnace production process. The stocker equipment effectively solves the problem of mismatched supply and cycle time between the vertical furnace process and upstream and downstream processes, and it also realizes the fully automatic opening and closing function of wafer boxes (FOUP), avoiding the impact of manual intervention, ensuring the clean environment of the vertical furnace production process, and improving product quality.
    • Wafer Transfer System (WTS)
      WTS(1735113710877).png
      Wafer Transfer System (WTS)
      The system interacts with the customer's OHT system to achieve Foup input and output, uses a FOUP robotic arm to transfer and store Foups between different process stages, uses an internal Loadport to open and map Foups, uses WTS to transfer, combine, and separate wafers, uses mapping at three locations to confirm wafer status and compare data, uses a fixed BF to buffer 50P wafers, and uses PTZ to hand off to the cleaning robot. The top EFU maintains a micro-clean environment for the equipment, and the top ion bar removes electrostatic residue from the transport path.
    • Equipment Front-End Module (EFEM)
      75d6e7ca-75d8-4d49-98e2-f3775b721fd8-恢复的(1733290909950).png
      Equipment Front-End Module (EFEM)
      EFEM stands for Equipment Front End Module. EFEM equipment seamlessly connects with various semiconductor process equipment (etching, PVD, CVD, cleaning equipment, etc.), ensuring automated wafer transfer and efficient wafer management in a clean environment. EFEM equipment has multiple interlocks to ensure the safety of personnel and equipment during wafer transfer.
    • Wafer Transfer Module (WTM)
      75d6e7ca-75d8-4d49-98e2-f3775b721fd8-恢复的(1733290740256).png
      Wafer Transfer Module (WTM)
      Wafer transfer platforms are an indispensable part of semiconductor process equipment. They primarily automate wafer transfer between different modules in cleanroom and vacuum environments. These platforms can quickly switch between atmospheric and vacuum states to meet system process requirements. This equipment is typically customized to meet customer process needs.

Vacuum Measurement & Control

PC300 Pressure Controller

PC300 Pressure Controller

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor display

Semiconductor lighting

Semiconductor-Microelectromechanical Systems

Power semiconductor

Compound semiconductor

The PC300 Series Pressure Controller regulates backside cooling gas pressure for wafers with integrated flow measurement capability, primarily deployed in CVD and Etch process equipment within integrated circuit manufacturing systems.
PC100 Pressure Controller

PC100 Pressure Controller

Semiconductor-Display

Semiconductor-Integrated Circuit

Semiconductor-lighting

Clean energy - Photovoltaic

The PC100 pressure controller is a digital pressure control product that provides high accuracy and reliability for gas pressure control and measurement. It supports both digital signals and 0~5V analog signals, and uses a single power supply. In addition, the standard open communication protocol facilitates customer development of control and acquisition software.
PC200 Pressure Controller

PC200 Pressure Controller

Semiconductor-Integrated Circuit

Semiconductor-Display

Life Sciences - Analytical Instruments

Scientific Research - Experimental Equipment

The PC200 Pressure Controller is designed for precise measurement and regulation of gas pressure, with extensive applications in both research and production across semiconductor IC, specialty materials, chemical processes, petroleum industry, pharmaceuticals, environmental protection, vacuum technology, and related fields.
PC210 Pressure Controller

PC210 Pressure Controller

Semiconductor-Integrated Circuit

Semiconductor-Display

Life Sciences - Analytical Instruments

Scientific Research - Experimental Equipment

The PC210 pressure controller is a digital pressure control product that provides high accuracy and reliability for gas pressure control and measurement. The analog product supports both digital and analog signals and can be powered by a dual power supply of ±15VDC.
EPC100 Exhaust Pressure Controller

EPC100 Exhaust Pressure Controller

Semiconductor/Integrated Circuit

Semiconductor/Advanced Packaging

Power semiconductor

Compound semiconductor

Clean energy/Photovoltaic

Scientific research/experimental equipment

The exhaust pressure controller (EPC) is used for the precise control and measurement of gas pressure. They have important applications in research and production in a wide range of fields, including semiconductor integrated circuit processes, special materials, chemical industry, petroleum industry, medicine, environmental protection, and vacuum.
BV100 Butterfly Valve

BV100 Butterfly Valve

Semiconductor-Integrated Circuit

Semiconductor display

BV100 butterfly valves are widely applied in IC, flat-panel displays, solar energy, and industrial processes for controlling the pressure within reaction chambers. They offer customizable solutions to rapidly adjust pressure under stringent process conditions (e.g., CVD).
BV200 Butterfly Valve

BV200 Butterfly Valve

Semiconductor-Integrated Circuit

Power semiconductor

BV200 butterfly valves are widely applied in IC , flat-panel displays, solar energy, and industrial processes for controlling the pressure within reaction chambers. They offer customizable solutions to rapidly adjust pressure under stringent process conditions (e.g.,CVD) .
BV300 Butterfly Valve

BV300 Butterfly Valve

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor display

Semiconductor lighting

Semiconductor-Microelectromechanical Systems

Power semiconductor

Compound semiconductor

BV􏚴􏚱􏚱 butterfly valves are widely applied in IC , flat-panel displays, solar energy, and industrial processes for controlling the pressure within reaction chambers. They offer customizable solutions to rapidly adjust pressure under stringent process conditions (e.g., CVD) .
PS100 Capacitance Diaphragm Gauge

PS100 Capacitance Diaphragm Gauge

Semiconductor-Integrated Circuit

Clean energy - Photovoltaic

The PS100 capacitance diaphragm gauge boasts high measurement accuracy and excellent repeatability, making it widely used in high-end equipment manufacturing fields such as semiconductors, photovoltaics, vacuum technology, and aerospace. This product uses an ultra-thin film as the pressure-sensitive element to accurately measure gas pressure in process chambers or other vacuum environments.
VG200 Capacitance Diaphragm Gauge

VG200 Capacitance Diaphragm Gauge

Semiconductor-Integrated Circuit

Clean energy - Photovoltaic

Specialty Industry - Vacuum Coating

Life Sciences - Analytical Instruments

Scientific Research - Experimental Equipment

The VG200 capacitance diaphragm gauge is employed for absolute pressure measurement in process chambers. Featuring ultra-high accuracy, full gas compatibility, and interference resistance, this product is specifically engineered for demanding industrial environments, with applications spanning IC, new energy, and medical equipment.
VS100 Vacuum Switch

VS100 Vacuum Switch

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor lighting

Power semiconductor

Compound semiconductor

The VS100 vacuum switch utilizes a piezoresistive pressure sensor to detect pressure changes in the medium. It compares these changes with preset pressure, coverting the pressure into digital switching signals. This technology is applied in fields such as integrated circuits, advanced packaging, semiconductor lighting, power semiconductors, and compound semiconductors.
PT100 Pressure Transmitter

PT100 Pressure Transmitter

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor lighting

Power semiconductor

Compound semiconductor

The PT100 employs a piezoresistive pressure sensor to detect pressure variations in the medium and converts the pressure into electrical signals. It can measure pressure changes in components such as gas manifolds, process chambers, and transfer chambers, with applications spanning integrated circuits, advanced packaging, semiconductor lighting, power semiconductors, and compound semiconductor technologies.
CVS100 Capacitance Pressure Switch

CVS100 Capacitance Pressure Switch

Semiconductor-Integrated Circuit

Specialty Industry - Petrochemicals

Life Science - Medical and Health

Scientific Research - Experimental Equipment

The CVS100 capacitance pressure switch provides accurate and reliable protection for vacuum equipment, atmospheric switches, and vacuum pressure processes. Applications include semiconductor processing tools, vacuum pumps, compressors, blowers, medical equipment, and machine tools.
DP100 Differential Pressure Gauge

DP100 Differential Pressure Gauge

Semiconductor-Integrated Circuit

Specialty Industry - Vacuum Coating

Life Science - Medical and Health

Scientific Research - Experimental Equipment

The DP100 differential pressure gauge boasts extremely high accuracy and repeatability, making it suitable for industrial and electronic control systems across a wide range of applications. This product utilizes an ultra-thin diaphragm as its pressure sensing element, enabling precise measurement of the gas pressure difference between the reference chamber and the test chamber.
LPT100 Liquid Pressure Sensor

LPT100 Liquid Pressure Sensor

Semiconductor-Integrated Circuit

The LPT100 liquid pressure sensor is a high-precision, corrosion-resistant product developed to meet the needs of semiconductor technology development. It is mainly used in CMP and cleaning equipment in the wet process of integrated circuit manufacturing.
Semiconductor
Clean Energy
Vacuum Industries
Life Sciences
Scientific Research
Semiconductor
PC300 Pressure Controller
Semiconductor-Integrated Circuit
Semiconductor-Advanced Packaging
Semiconductor display
Semiconductor lighting
Semiconductor-Microelectromechanical Systems
Power semiconductor
Compound semiconductor
The PC300 Series Pressure Controller regulates backside cooling gas pressure for wafers with integrated flow measurement capability, primarily deployed in CVD and Etch process equipment within integrated circuit manufacturing systems.
PC100 Pressure Controller
Semiconductor-Display
Semiconductor-Integrated Circuit
Semiconductor-lighting
Clean energy - Photovoltaic
The PC100 pressure controller is a digital pressure control product that provides high accuracy and reliability for gas pressure control and measurement. It supports both digital signals and 0~5V analog signals, and uses a single power supply. In addition, the standard open communication protocol facilitates customer development of control and acquisition software.
PC200 Pressure Controller
Semiconductor-Integrated Circuit
Semiconductor-Display
Life Sciences - Analytical Instruments
Scientific Research - Experimental Equipment
The PC200 Pressure Controller is designed for precise measurement and regulation of gas pressure, with extensive applications in both research and production across semiconductor IC, specialty materials, chemical processes, petroleum industry, pharmaceuticals, environmental protection, vacuum technology, and related fields.
PC210 Pressure Controller
Semiconductor-Integrated Circuit
Semiconductor-Display
Life Sciences - Analytical Instruments
Scientific Research - Experimental Equipment
The PC210 pressure controller is a digital pressure control product that provides high accuracy and reliability for gas pressure control and measurement. The analog product supports both digital and analog signals and can be powered by a dual power supply of ±15VDC.
EPC100 Exhaust Pressure Controller
Semiconductor/Integrated Circuit
Semiconductor/Advanced Packaging
Power semiconductor
Compound semiconductor
Clean energy/Photovoltaic
Scientific research/experimental equipment
The exhaust pressure controller (EPC) is used for the precise control and measurement of gas pressure. They have important applications in research and production in a wide range of fields, including semiconductor integrated circuit processes, special materials, chemical industry, petroleum industry, medicine, environmental protection, and vacuum.
BV100 Butterfly Valve
Semiconductor-Integrated Circuit
Semiconductor display
BV100 butterfly valves are widely applied in IC, flat-panel displays, solar energy, and industrial processes for controlling the pressure within reaction chambers. They offer customizable solutions to rapidly adjust pressure under stringent process conditions (e.g., CVD).
BV200 Butterfly Valve
Semiconductor-Integrated Circuit
Power semiconductor
BV200 butterfly valves are widely applied in IC , flat-panel displays, solar energy, and industrial processes for controlling the pressure within reaction chambers. They offer customizable solutions to rapidly adjust pressure under stringent process conditions (e.g.,CVD) .
BV300 Butterfly Valve
Semiconductor-Integrated Circuit
Semiconductor-Advanced Packaging
Semiconductor display
Semiconductor lighting
Semiconductor-Microelectromechanical Systems
Power semiconductor
Compound semiconductor
BV􏚴􏚱􏚱 butterfly valves are widely applied in IC , flat-panel displays, solar energy, and industrial processes for controlling the pressure within reaction chambers. They offer customizable solutions to rapidly adjust pressure under stringent process conditions (e.g., CVD) .
VG200 Capacitance Diaphragm Gauge
Semiconductor-Integrated Circuit
Clean energy - Photovoltaic
Specialty Industry - Vacuum Coating
Life Sciences - Analytical Instruments
Scientific Research - Experimental Equipment
The VG200 capacitance diaphragm gauge is employed for absolute pressure measurement in process chambers. Featuring ultra-high accuracy, full gas compatibility, and interference resistance, this product is specifically engineered for demanding industrial environments, with applications spanning IC, new energy, and medical equipment.
VS100 Vacuum Switch
Semiconductor-Integrated Circuit
Semiconductor-Advanced Packaging
Semiconductor lighting
Power semiconductor
Compound semiconductor
The VS100 vacuum switch utilizes a piezoresistive pressure sensor to detect pressure changes in the medium. It compares these changes with preset pressure, coverting the pressure into digital switching signals. This technology is applied in fields such as integrated circuits, advanced packaging, semiconductor lighting, power semiconductors, and compound semiconductors.
PT100 Pressure Transmitter
Semiconductor-Integrated Circuit
Semiconductor-Advanced Packaging
Semiconductor lighting
Power semiconductor
Compound semiconductor
The PT100 employs a piezoresistive pressure sensor to detect pressure variations in the medium and converts the pressure into electrical signals. It can measure pressure changes in components such as gas manifolds, process chambers, and transfer chambers, with applications spanning integrated circuits, advanced packaging, semiconductor lighting, power semiconductors, and compound semiconductor technologies.
CVS100 Capacitance Pressure Switch
Semiconductor-Integrated Circuit
Specialty Industry - Petrochemicals
Life Science - Medical and Health
Scientific Research - Experimental Equipment
The CVS100 capacitance pressure switch provides accurate and reliable protection for vacuum equipment, atmospheric switches, and vacuum pressure processes. Applications include semiconductor processing tools, vacuum pumps, compressors, blowers, medical equipment, and machine tools.
DP100 Differential Pressure Gauge
Semiconductor-Integrated Circuit
Specialty Industry - Vacuum Coating
Life Science - Medical and Health
Scientific Research - Experimental Equipment
The DP100 differential pressure gauge boasts extremely high accuracy and repeatability, making it suitable for industrial and electronic control systems across a wide range of applications. This product utilizes an ultra-thin diaphragm as its pressure sensing element, enabling precise measurement of the gas pressure difference between the reference chamber and the test chamber.
LPT100 Liquid Pressure Sensor
Semiconductor-Integrated Circuit
The LPT100 liquid pressure sensor is a high-precision, corrosion-resistant product developed to meet the needs of semiconductor technology development. It is mainly used in CMP and cleaning equipment in the wet process of integrated circuit manufacturing.

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