LPT100 Liquid Pressure Sensor

The LPT100 liquid pressure sensor is a high-precision, corrosion-resistant product developed to meet the needs of semiconductor technology development. It is mainly used in CMP and cleaning equipment in the wet process of integrated circuit manufacturing.

Advantages

High accuracy

Employing high-precision sensor components, it quickly responds to the pressure of the fluid medium and accurately measures the pressure value. The precision error is within 1%, meeting the usage requirements.

High stability

Operating under a 0-100 PSIG cyclic pressure value, the output signal maintains stability and accuracy.

Customized solutions

Customizable development according to user needs, such as range, connectors, output signals, etc. We provide corresponding design solutions to meet customer needs.

Innovation

Based on pressure signal acquisition and conversion technology

Accurate measurement of fluid pressure signals can be achieved. Structural design of corrosion resistant

Corrosion-resistant sensor structure design

Excellent performance in resisting acids, alkalis, oxidants and other chemical reagents

Semiconductor-grade cleanroom process

Using high-purity materials to meet the design requirements of semiconductor components

Application areas

Semiconductor-Integrated Circuit

Technical indicators

Model LPT100

Material

Wetted Parts

Body: PTFE

Sensor and Connector: PFA

Seal: Perfluoro O-ring

Non-Wetted Parts

PE, PP, PVDF, etc.

Cable

FEP or AFPF wrapped

Physical Parameters

Pressure Range

0-30, 0-60, 0-100 (psig)

Overload Pressure

1.5*F.S.

Interface Type

Single-ended

T-type

Mechanical Connector

1/4、3/8、1/2 Flared

1/4MNPT

Electrical Parameters

Supply Voltage

+24VDC

Output Signal

4-20mA, 0-5V or 0-10V

Accuracy

1% F.S.

Operating Temperature

10-60℃

Cable Length

1.5M

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