BV200 Butterfly Valve-AURASKY

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BV200 Butterfly Valve

BV200 butterfly valves are widely applied in IC , flat-panel displays, solar energy, and industrial processes for controlling the pressure within reaction chambers. They offer customizable solutions to rapidly adjust pressure under stringent process conditions (e.g.,CVD) .

Advantages

High Position Accuracy

Equipped with a 5000-line photoelectric encoder, achieving a position resolution of up to 12,800 (within a 90° range).

Meet the Needs of Advanced Process Applications

Supports process data memory and inter-device data transfer, ensuring stable process performance and adaptability to diverse application scenarios.

High Pressure Control Accuracy

The pressure control accuracy can reach 0.1% S.P., and the fluctuation of butterfly valve opening during stable operation is less than 1% S.P.

Customizable

The product supports customization of valve body materials, adjustable plate clearances, and multiple standard mechanical interfaces, with expandable SPS and PFO functional capabilities.

Innovation

Dual Self Matching Pressure Sensing Technology

Supports dual vacuum gauge signal acquisition, provides ±15V or +24V power supply to the vacuum gauges, and can automatically switch measurement ranges based on process requirements.

Advanced Servo Drive Technology

Adopting a customized servo control on-board system and using a multi-point slope control algorithm, the butterfly plate can be positioned faster, with opening or closing time up to 0.2sec.

L-V-P Pressure Control Technology

The pressure control unit records the relationship between pressure and valve opening in the process environment, using a combination of position, speed, and pressure three loops. At the same time, it dynamically calculates the pressure to pressure ratio, position to pressure ratio, target pressure position, and estimated time to reach the target pressure, thereby actively intervening in the changes in valve opening and achieving fast and stable pressure control.

Application areas

Semiconductor-Integrated Circuit

Power semiconductor

Technical indicators

Model	BV200
Material	Valve Body/Valve Plate	Aluminum Alloy 6061/Stainless Steel 613L
	Shaft/Valve Plate Screw	Stainless Steel 316L
	Bearing Sleeve	lglidur X
Bearing Seal	Environmental End	FKM
Bearing Seal	Vacuum End	FKM
Valve Body Leakage Rate	Stainless Steel Material	1×10E-9 mbar ·L/s
Communication Interface		RS485 (D-sub female, DB25) or DeviceNet (DNET aviation connector)
Power Supply Port	Interface Type	D-sub male, DA15
Power Supply Port	Voltage	+24 VDC
Power Consumption	Control/Drive	40 W
Operating Environment	Temperature	0~50 degrees Celsius, recommended use below 35 degrees
Operating Environment	Humidity	0~95%RH
Regulation Interface Parameters	Interface Type	D-sub female, DA15
	Signal Voltage	0～10VDC linear pressure
	ADC Resolution	0.1 mV
	Sampling Time	2ms
	Supply Voltage (Output)	+24 VDC/1.5A max.
Actuator		Stepper Motor
Motor Resolution		12800 (90°)
Pressure Control Accuracy		5 mV or 0.1% of the setpoint, whichever is greater
Protection Level		IP 40
Channel Inner Diameter		40mm/50mm/63mm/80mm/100mm
Valve Plate Switching Time		0.2s

Note:

Butterfly valves are usually calibrated using voltage to sensor signals at the factory.

The unit of gas pressure is specified as: Torr; mbar

Standard conditions are specified as: Temperature -- 273.15K (0℃); Pressure -- 101325 Pa (760mm Hg)

In Huacheng Electronics PC products, the units SCCM and "mL/min, 0°c, 1atm" are equivalent, and the units SLM and "L/min, 0℃, 1atm" are equivalent.

F.S. (Full Scale): Full scale value; S.P. (Set Point): Set point value