EPC100 Exhaust Pressure Controller-AURASKY

Home

EPC100 Exhaust Pressure Controller

The exhaust pressure controller (EPC) is used for the precise control and measurement of gas pressure. They have important applications in research and production in a wide range of fields, including semiconductor integrated circuit processes, special materials, chemical industry, petroleum industry, medicine, environmental protection, and vacuum.

Advantages

Rapid mechanical pressure control

Based on aerodynamic principles and using an air-floating piston structure, high-speed and low-friction movement of the pressure regulating valve can be achieved.

Supports analog and digital control

Supports both digital and 0~5V analog signals.

Corrosion-resistant

The gas-contacting material uses corrosion-resistant PTFE material.

Innovation

Multi-force balance technology based on a mechanical pneumatic piston

The piston is subjected to four forces: purified room pressure, gravity, spring tension, and process pressure, to maintain a constant process pressure. For a given pressure setpoint, the resultant force balance depends only on the process pressure, thus achieving rapid adjustment of exhaust fluctuations.

Motor variable frequency control technology with soft hysteresis compensation

When the setpoint remains unchanged, the piston can self-adjust and control; when the setpoint changes, the motor performs closed-loop control. During closed-loop control, different thresholds are set segmentally based on the difference between the actual pressure and the set pressure to achieve motor frequency conversion control. The closer to the setpoint, the slower the motor movement, thus achieving stable pressure control.

Nitrogen back-pressure corrosion protection design technology

By leveraging the principle of airflow stratification and employing "gas control with gas", high-pressure nitrogen gas is used to backflush low-pressure process gas, creating a protective gas layer to prevent the leakage of corrosive gases. This prevents corrosion of pressure-transmitting components, thereby improving product lifespan.

Application areas

Semiconductor/Integrated Circuit

Semiconductor/Advanced Packaging

Power semiconductor

Compound semiconductor

Clean energy/Photovoltaic

Scientific research/experimental equipment

Technical indicators

Model	EPC100
Contact Gas Material	Polytetrafluoroethylene (PTFE)
Pressure Type	Relative Pressure
Control Pressure Range	-3 ~ -23mmH2O、-3 ~ -50mmH2O
Inlet Flow Rate Range	0.3 ~ 50SLM
Installation Method	Horizontal installation, Vertical installation
Pressure Control Accuracy	Dry oxygen process: S.P.±1mmH2O
Pressure Control Accuracy	Wet oxygen process: S.P.±2mmH2O
Control Signal	0~5V
Pressure Detection Port	φ6 Tower type connector
Drain Interface	1/4 NPT internal thread
N2 Interface	1/4 ferrule (40 psig ~80psig)
Mechanical inlet and outlet interface	1" female NPT
Power Supply	±15V
Electrical Interface	Pressure control valve: DB-15 pin
Electrical Interface	Control box: Conxall-10 holes, DB-15 holes, DB-9 pins

Note:

Gas pressure controllers are usually calibrated with nitrogen (N ₂ )

The unit of gas pressure is specified as: Torr; mbar; mmH2O (millimeter of water column)

Standard state is defined as: Temperature - 273.15K (0℃); Pressure - 101325 Pa (760mm Hg)

In Huacheng Electronics PC products, the units SCCM and "mL/min，0°c，1atm" are equivalent, and the units SLM and "L/min，0℃，1atm" are equivalent

F.S.(Full Scale): Full scale value; S.P.(Set Point): Set point value

EPC100 Reaction Chamber Pressure Control Chinese User Manual V1.0

2024-11-28