PC300 Pressure Controller-AURASKY

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PC300 Pressure Controller

The PC300 Series Pressure Controller regulates backside cooling gas pressure for wafers with integrated flow measurement capability, primarily deployed in CVD and Etch process equipment within integrated circuit manufacturing systems.

Advantages

High Pressure Control Accuracy

Pressure control accuracy range: ±0.2% F.S.

Customizable

Can be customized according to different customer needs non-conventional range, different sizes, different interfaces (including electrical, mechanical).

Fast Response

Product response time: < 1.0 sec.

Dual Power Supply in a Wide Range

+15 VDC power supply, dual power supply in a wide range, low current and low power consumption.

Innovation

Product Digitization

The product adopts advanced microprocessor, which has the advantages of high intelligence, high reliability and convenient maintenance.

Dual Control Technology

The product employs dual flow and pressure control technology, achieving "high responsiveness" and "high precision" performance configuration.

Application areas

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor display

Semiconductor lighting

Semiconductor-Microelectromechanical Systems

Power semiconductor

Compound semiconductor

Technical indicators

Model	PC300
Full Scale Flow Rate	(10 20 50 100 200 500 1000 2000 5000) SCCM
Full Scale Pressure	(10 20 50 100) Torr
Control Method	Downstream
Pressure Control Accuracy	±0.2% of F.S.
Control Repeatability	±0.2% of F.S.
Response Time	<1.0 Second
Operating Temperature Range	10℃ to 50℃
Valve Type	Normally Closed
Leak Rate	<1x10^-12 (SCCM/SEC He) ^-12 (SCCM/SEC He)

PC300 Series Chinese Product Manual

2024-11-27

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The PC100 pressure controller is a digital pressure control product that provides high accuracy and reliability for gas pressure control and measurement. It supports both digital signals and 0~5V analog signals, and uses a single power supply. In addition, the standard open communication protocol facilitates customer development of control and acquisition software.

PC200 Pressure Controller

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The PC200 Pressure Controller is designed for precise measurement and regulation of gas pressure, with extensive applications in both research and production across semiconductor IC, specialty materials, chemical processes, petroleum industry, pharmaceuticals, environmental protection, vacuum technology, and related fields.

PC210 Pressure Controller

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The PC210 pressure controller is a digital pressure control product that provides high accuracy and reliability for gas pressure control and measurement. The analog product supports both digital and analog signals and can be powered by a dual power supply of ±15VDC.

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