PC100 Pressure Controller

The PC100 pressure controller is a digital pressure control product that provides high accuracy and reliability for gas pressure control and measurement. It supports both digital signals and 0~5V analog signals, and uses a single power supply. In addition, the standard open communication protocol facilitates customer development of control and acquisition software.

Advantages

Customized solutions

We can customize different products and solutions based on different customer needs.

Fast response

Pressure PID adjustment is performed by pre-increasing or pre-decreasing the valve voltage according to different modes, allowing the product to boast fast response speed and stable control.

Corrosion-resistant

Using PTFE (polytetrafluoroethylene) material for parts in contact with gas. PTFE enhances product lifespan and enables use with various corrosive gases.

Innovation

Pressure sensing technology based on PTS

On one hand, temperature compensation is achieved by establishing a pressure-temperature data template to calculate the compensation coefficient table through the optimization of pressure and temperature parameters. On the other hand, by improving the sensor installation position and reducing the volume of the detection cavity, the sensor signal measurement is made more accurate, precisely controlling the pressure.

AI-based stress control technology

By establishing a pressure fluctuation data model, quickly identify patterns such as fixed flow pressure fluctuation and fixed pressure flow fluctuation. According to different patterns, adopt a pre-increase or decrease valve voltage method for pressure PID adjustment. This strategy is characterized by fast response speed and stable control.

All-metal corrosion-resistant technology

Embedded fluorocarbon proportional pressure regulating valve technology is used. The valve sealing structure mainly uses 316L stainless steel and PTFE (polytetrafluoroethylene) material. PTFE material can improve the service life of the product and is suitable for various types of corrosive gases. Meanwhile, the sealing performance is superior to that of metal seals.

Application areas

Semiconductor-Display

Semiconductor-Integrated Circuit

Semiconductor-lighting

Clean energy - Photovoltaic

Technical indicators

Model PC100
Pressure Type Absolute Pressure
Full Scale of Controlled Pressure 1000Torr、1200mbar
Pressure Resistance 3MPa
Full Scale Flow Rate at Valve Port 50、500sccm; 1、2、3、5SLM
Control Method Upstream
Temperature Coefficient Zero:±0.02% of F.s./℃；Span: ±0.04% of Reading/℃
Pressure Resolution 0.1 Torr
Pressure Control Accuracy ±1.0% of Reading (≥10%FS); ±0.2% of F.S.(<10%FS )
Response Time <1.0 S
Operating Temperature Range 10℃~50℃
Mechanical Interface Double Ferrule 1/4"、 VCR 1/4” Male Connector
Valve Type Normally Closed
External Leakage <1x10 -10 (scc/sec He)
Internal Leakage <1.0% of Full Scale Flow Rate at Valve Port (when the valve is closed, the inlet is 25 psig, and the outlet is atmospheric pressure)
Power Supply +15 ~ +24 VDC(<4 watts)
Electrical Interface DB-9 Pin、EtherCAT Connector

Note:

Gas pressure controllers are usually calibrated with nitrogen (N 2 )

The unit of gas pressure is defined as: Torr; mbar

Standard conditions are defined as: Temperature - 273.15K (0℃); Pressure - 101325 Pa (760mm Hg)

In Huacheng Electronics PC products, the unit SCCM is equivalent to “mL/min，0°c，1atm”, and the unit SLM is equivalent to “L/min，0℃，1atm”.

F.S.(Full Scale): Full Scale Value; S.P.(Set Point): Set Point Value

PC100 Gas Pressure Controller Chinese User Manual V1.0

2024-11-28

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