PC200 Pressure Controller
Advantages
High Pressure Control Accuracy
Fast Response
Customizable
Innovation
Dual Power Supply in a Wide Range
Four Combinations For Analog Voltage
Upstream and Downstream
Application areas
Semiconductor-Integrated Circuit
Semiconductor-Display
Life Sciences - Analytical Instruments
Scientific Research - Experimental Equipment
Technical indicators
Model | PC200 |
Pressure Type | Absolute pressure, Gauge pressure |
Full-scale control pressure | Absolute pressure: 1000Torr, 2000Torr; 300Kpa, 3000mbar Gauge pressure: 500Kpa |
Withstand pressure | 3MPa |
Full-scale flow rate at valve port | 200sccm; 1, 2, 4, 5, 10, 15, 50SLM |
Control method | Upstream, Downstream |
Temperature coefficient | Zero: ±0.02% of F.s./℃;Span: ±0.04% of Reading/℃ |
Pressure resolution | 0.1 Torr |
Pressure control accuracy | ±0.5% of F.S. |
Response time | <1.0 S |
Operating temperature range | 5℃~50℃ |
Mechanical interface | VCR1/4" male connector, VCR3/8" male connector |
Valve type | Normally closed, Normally open |
External leakage | <5x10 -12 (Pa.m 3 /s He) |
Internal leakage | <1.0% of full-scale flow rate at valve port (when the valve is closed, the inlet pressure is 25psig, and the outlet pressure is atmospheric) |
Power supply | +15~+24VDC (single-stage), ±15VDC (dual-polarity, only supports DB-9 pin interface) |
Electrical interface | DeviceNet connector, DB-9 pin, EtherCAT connector |
Note:
Gas pressure controllers are usually calibrated using nitrogen (N 2 ) at the factory.
The unit of gas pressure is defined as: Torr (Torr); mbar (millibar); KPa (kilopascal);
Standard state is defined as: temperature -- 273.15K (0℃ ); pressure -- 101325 Pa (760mm Hg)
In Huacheng Electronics PC products, the units SCCM and "mL/min, 0°c, 1atm" are equivalent, and the units SLM and "L/min, 0℃, 1atm" are equivalent.
F.S.(Full Scale): Full-scale value; S.P.(Set Point): Set point value
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