PC200 Pressure Controller

The PC200 Pressure Controller is designed for precise measurement and regulation of gas pressure, with extensive applications in both research and production across semiconductor IC, specialty materials, chemical processes, petroleum industry, pharmaceuticals, environmental protection, vacuum technology, and related fields.

Advantages

High Pressure Control Accuracy

The pressure sensor features high resolution, delivering pressure control accuracy within ±0.5% F.S.

Fast Response

During the pressure step, the pressure can be stabilized quickly, within 1sec.

Customizable

The system supports customization of various mechanical interfaces ;connector options include 1/4 ”VCR and 3/8 ” VCR.

Innovation

Dual Power Supply in a Wide Range

±15VDC power supply, dual power supply in a wide range, low current and low power consumption.

Four Combinations For Analog Voltage

0~10VDC analog voltage input and output, compatible with 0~5VDC analog voltage input and output, analog voltage input and output can be in four combinations for customers to choose.

Upstream and Downstream

Enables innovative integrated upstream/downstream pressure control without hardware replacement. By simply adjusting parameters and reversing airflow direction, it seamlessly switches between upstream/downstream control modes, adapting to diverse application scenarios. This design streamlines operations and ensures effortless control.

Application areas

Semiconductor-Integrated Circuit

Semiconductor-Display

Life Sciences - Analytical Instruments

Scientific Research - Experimental Equipment

Technical indicators

Model PC200
Pressure Type Absolute pressure, Gauge pressure
Full-scale control pressure Absolute pressure: 1000Torr, 2000Torr; 300Kpa, 3000mbar Gauge pressure: 500Kpa
Withstand pressure 3MPa
Full-scale flow rate at valve port 200sccm; 1, 2, 4, 5, 10, 15, 50SLM
Control method Upstream, Downstream
Temperature coefficient Zero: ±0.02% of F.s./℃;Span: ±0.04% of Reading/℃
Pressure resolution 0.1 Torr
Pressure control accuracy ±0.5% of F.S.
Response time <1.0 S
Operating temperature range 5℃~50℃
Mechanical interface VCR1/4" male connector, VCR3/8" male connector
Valve type Normally closed, Normally open
External leakage <5x10 -12 (Pa.m 3 /s He)
Internal leakage <1.0% of full-scale flow rate at valve port (when the valve is closed, the inlet pressure is 25psig, and the outlet pressure is atmospheric)
Power supply +15~+24VDC (single-stage), ±15VDC (dual-polarity, only supports DB-9 pin interface)
Electrical interface DeviceNet connector, DB-9 pin, EtherCAT connector

Note:

Gas pressure controllers are usually calibrated using nitrogen (N 2 ) at the factory.

The unit of gas pressure is defined as: Torr (Torr); mbar (millibar); KPa (kilopascal);

Standard state is defined as: temperature -- 273.15K (0℃ ); pressure -- 101325 Pa (760mm Hg)

In Huacheng Electronics PC products, the units SCCM and "mL/min, 0°c, 1atm" are equivalent, and the units SLM and "L/min, 0℃, 1atm" are equivalent.

F.S.(Full Scale): Full-scale value; S.P.(Set Point): Set point value

 

PC200 Gas Pressure Controller Chinese Manual V1.0

2024-11-28

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