PC210 Pressure Controller
Advantages
High pressure control accuracy
Fast response time
Customized solutions
Innovation
Supports dual power supply with wide voltage range
Four combinations of simulated voltage
Upstream and downstream pressure control
Application areas
Semiconductor-Integrated Circuit
Semiconductor-Display
Life Sciences - Analytical Instruments
Scientific Research - Experimental Equipment
Technical indicators
Model | PC210 |
Pressure Type | Absolute Pressure |
Full Scale of Controlled Pressure | Absolute Pressure: 100Torr, 200Torr, 1000Torr; 300Kpa |
Pressure Resistance | 3MPa |
Full Scale Flow Rate of Valve Port | 200SCCM; 1, 2, 4, 5, 10, 20SLM |
Control Method | Upstream, Downstream |
Temperature Coefficient | Zero: ±0.04% of F.s./℃;Span: ±0.04% of Reading/℃ |
Pressure Resolution | 0.1 Torr |
Pressure Control Accuracy | ±0.5% of Reading |
Operating Temperature Range | 10℃~50℃ |
Mechanical Interface | VCR 1/4" Male Connector, VCR 1/2" Male Connector |
Valve Type | Normally Closed |
External Leakage | <1x10 -9 (scc/sec He) |
Internal Leakage | <1.0% of valve port full scale flow rate or 1sccm (1 atmospheric pressure N2), whichever is larger |
Power Supply | ±15VDC |
Electrical Interface | DB-15 Pin |
Note:
Gas pressure controllers are usually calibrated with nitrogen (N 2 )
The unit of gas pressure is defined as: Torr; mbar; KPa
Standard conditions are defined as: Temperature -- 273.15K (0℃); Pressure -- 101325 Pa (760mm Hg)
In Huacheng Electronics PC products, the units SCCM and "mL/min, 0°c, 1atm" are equivalent, and the units SLM and "L/min, 0℃, 1atm" are equivalent
F.S. (Full Scale): Full scale value; S.P. (Set Point): Set point value
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