PS100 Capacitance Diaphragm Gauge
The PS100 capacitance diaphragm gauge boasts high measurement accuracy and excellent repeatability, making it widely used in high-end equipment manufacturing fields such as semiconductors, photovoltaics, vacuum technology, and aerospace. This product uses an ultra-thin film as the pressure-sensitive element to accurately measure gas pressure in process chambers or other vacuum environments.
Advantages
Measurable corrosion-resistant gas
Uses alloy diaphragm, corrosion resistant.
High measurement accuracy
Product accuracy can reach 0.5% of F.S.
Good repeatability
Using dual capacitor measurement technology greatly reduces the influence of temperature and atmospheric pressure on the vacuum gauge, and has good repeatability.
Innovation
Real-time pressure measurement
Fast response time, gas pressure will be output in real time as analog data.
Heating function
With a heating function that maintains a constant temperature with an error of ±0.5℃, reducing the impact of ambient temperature on product stability.
Set pressure/temperature indication
An alarm threshold can be set. An alarm will trigger if the value is below or above the set point. Choose either pressure or temperature.
Application areas
Semiconductor-Integrated Circuit
Clean energy - Photovoltaic
Technical indicators
| Model | PS100 | |
| Index | Unit | Specifications |
| Full Scale Ranges | Torr | 0.1 ~1000 etc. (Customizable) |
| Accuracy | % of reading | ±0.15% ~ ±1% |
| Resolution | % of F.S. | 0.00% |
| Zero Temperature Coefficient | % of F.S./℃ | 0.02%(0.03% for <10Torr) |
| Span Temperature Coefficient | %of reading/℃ | 0.04% |
| Ambient Operating Temperature | ℃ | 15 ~ 40℃ |
| Sensor Heated Temperature | ℃ | Unheated, 45℃~200℃ |
| Warm-up Time | h | 4 |
| Overpressure Limit | Psia | 45 (>1Torr) 30 (others) |
| Materials Exposed to Process Gases (excluding optional fittings) | / | Nickel-based alloy, etc. |
| Input Power Required | VDC | ±15V±10% DC 24V±10% DC |
| Output Signal | VDC | 0 ~ 10V |
| Trip Relay Specifications | / | 2 |
| Electrical Connectors | / | D-type 15-pin male connector, DeviceNet connector, EtherCAT connector |
| Connection Fittings | / | VCR 1/2″ female connector, VCR 1/4″ female connector, NW16-KF, NW25-KF, etc. |
| Install type | / | Vertical, Horizontal |
PS100 Capacitance Thin-Film Vacuum Gauge User Manual 20240725
2024-11-28
Related Products
Contact Us
If you have any questions, please leave your detailed requirements information here, and we will be happy to serve you.
