BV300 Butterfly Valve-AURASKY

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BV300 Butterfly Valve

BV􏚴􏚱􏚱 butterfly valves are widely applied in IC , flat-panel displays, solar energy, and industrial processes for controlling the pressure within reaction chambers. They offer customizable solutions to rapidly adjust pressure under stringent process conditions (e.g., CVD) .

Advantages

High Position Accuracy

Equipped with a 5000-line photoelectric encoder, achieving a position resolution of up to 12,800 (within a 90° range).

Meet the Needs of Advanced Process Applications

Supports process data memory and inter-device data transfer, ensuring stable process performance and adaptability to diverse application scenarios.

High Pressure Control Accuracy

The pressure control accuracy can reach 0.1% S.P., and the fluctuation of butterfly valve opening during stable operation is less than 1% S.P.

Customizable

The product supports customization of valve body materials, adjustable plate clearances, and multiple standard mechanical interfaces, with expandable SPS and PFO functional capabilities.

Innovation

Dual Self Matching Pressure Sensing Technology

Supports dual vacuum gauge signal acquisition, provides ±15V or +24V power supply to the vacuum gauges, and can automatically switch measurement ranges based on process requirements.

L-V-P Pressure Control Technology

The pressure control unit records the relationship between pressure and valve opening in the process environment, using a combination of position, speed, and pressure three loops. At the same time, it dynamically calculates the pressure to pressure ratio, position to pressure ratio, target pressure position, and estimated time to reach the target pressure, thereby actively intervening in the changes in valve opening and achieving fast and stable pressure control.

Self-learning Technology

support self-learning function, adapt to different chamber vacuum systems and different working conditions, and achieve fast and accurate pressure control.

Advanced Servo Drive Technology

Adopting a customized servo control on-board system and using a multi-point slope control algorithm, the butterfly plate can be positioned faster, with opening or closing time up to 0.2s.

Application areas

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor display

Semiconductor lighting

Semiconductor-Microelectromechanical Systems

Power semiconductor

Compound semiconductor

Technical indicators

Model	BV300
Flange End Interface Type and Size	ISO-KF:DN40、DN50; ISO-F: DN63、DN80、DN100、DN160、DN200
Leak Rate	1 ×10E ^-9 mbar l/s
Pressure Range (at 20℃)	1×10E ^-8 mbar-1.2bar (abs)
Pressure Control Accuracy	5 mV or 0.1% of setpoint, whichever is higher
Sensor Input Signal	0-10VDC
Material	Valve body/Valve plate: 316L/Aluminum; Seal: Fluororubber/Perfluoro
Position Resolution	12800 (90° angle)
Response Time	Non-sealed type: switch 0.2S; Sealed type: switch 0.6S
Communication Interface	D-Sub, DB-25 Female, RS422/RS485, RS232, DeviceNet, EtherCAT
Power Supply Interface	D-Sub, DA-15 male, +24 VDC(±10%)@0.5 V pk-pk max
Vacuum Gauge Interface (Sensor Interface)	D-Sub, DA-15 female
Operating Ambient Temperature	0 ℃ to +50 ℃ max. (Recommended <35 ℃)
Installation Position	Horizontal and vertical installation

Note:

Butterfly valves are usually calibrated with voltage to the sensor signal at the factory.

The unit of gas pressure is specified as: Torr; mbar

Standard state is defined as: Temperature - 273.15K (0℃); Pressure - 101325 Pa (760mm Hg)

F.S. (Full Scale): Full scale value; S.P. (Set Point): Set point value

BV300 Butterfly Valve Chinese User Manual V1.0

2024-11-28