VS100 Vacuum Switch-AURASKY

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VS100 Vacuum Switch

The VS100 vacuum switch utilizes a piezoresistive pressure sensor to detect pressure changes in the medium. It compares these changes with preset pressure, coverting the pressure into digital switching signals. This technology is applied in fields such as integrated circuits, advanced packaging, semiconductor lighting, power semiconductors, and compound semiconductors.

Advantages

Low Temperature Drift

High-accuracy temperature compensated sensor.

The setpoint can be set to any pressure

Easy installation with setpoints factory preset or field-adjustable within the setting range , effectively minimizing material SKUs.

Customizable

Can be customized according to different customer needs non-conventional range, different sizes, different interfaces (including electrical, mechanical).

High Compatibility and Stability

Applicable to both ordinary and corrosive gases, ensuring stable operation under various operating conditions.

Innovation

32-bit MCU high-speed processor

Digital circuit control

Editable actuation pressure points can eectively reduce required material types.

High-precision design enables replacement of traditional mechanical vacuum switch

Application areas

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor lighting

Power semiconductor

Compound semiconductor

Technical indicators

Model	VS100
Range and Pressure Setpoint	Range	Pressure Setpoint
	Absolute Pressure 750 Torr	75～735 Torr
	Absolute Pressure 1000 Torr	20～990 Torr
	Gauge Pressure -750～750 Torr	-150～110 Torr
	Note: The pressure setpoint is generally 1%FS～99%FS
Default Setting	The default setting for general models is: Upper limit alarm, setpoint 100%FS, hysteresis 2%FS. Setting requires the use of special software and cables provided by the supplier. For customized models, the alarm direction, setpoint, and hysteresis have been set according to requirements at the factory.
Accuracy	±0.5%FS
Leak Rate	<1x10 ^-9 atm.cc/sec He
Temperature Drift Coefficient	0.1% FS/℃
Operating Temperature Range	0～80℃
Withstand Pressure Limit	2 times the rated pressure
Burst Pressure	5 times the rated pressure
Process Side Material	316L Ss SEMI F20/Hastelloy C-276
Supply Voltage	24V±10%VDC
Output	Passive contact relay output (1NO, 1NC) When not powered, NO is open, and NC is closed
Electrical Interface	Loose wire/DB9 male
Setpoint Setting Method	Factory Setting/Client Setting
Interface Type	1.125“C-seal/1.125”W-seal/4VCR/KF25(NW25)/KF16

VS100 Series Vacuum Pressure Switch User Manual

2025-01-02