VG200 Capacitance Diaphragm Gauge-AURASKY

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VG200 Capacitance Diaphragm Gauge

The VG200 capacitance diaphragm gauge is employed for absolute pressure measurement in process chambers. Featuring ultra-high accuracy, full gas compatibility, and interference resistance, this product is specifically engineered for demanding industrial environments, with applications spanning IC, new energy, and medical equipment.

Advantages

Nanometer-level Resolution

Diode bridge circuit enables AF-level(10-8F) capacitance measurement, accuracy up to 0.001Torr.

Interference Resistance

Metal shielding +EMC Level 4 certified circuit, error ＜0.05% in strong EMI environments.

Ultra-low Latency Response

30ms full-range dynamic capture for precise control of rapid vacuum changes.

Maintenance-free

Nickel-based alloy sensor, corrosion-resistant lifespan ＞100,000 hours, monthly drift ＜ 0.1%F.S.

Innovation

Differential Capacitance Sensing Technology

Dual-capacitor design delivers threefold sensitivity enhancement over conventional solutions with automatic temperature drift compensation. Features a broad measurement range of 0.1-1000Torr and linearity error＜±0.15%.

AF-level Precision Measurement System

Patented diode bridge circuit achieves resolution breakthrough of 1aF, precisely detecting microscopic pressure fluctuations. Built-in noise filtering algprithm enables signal-to-noise ratio up to 90dB.

Millisecond Response Architecture

High-spend signal processor + low-latency circuitry achieve full-range. pressure feedback within 30ms, enabling high-frequency dynamic process control.

Anti-RF Interference Design for Etching Processes

Dual structural optimization: RF shielding plate + circuit isolation layout suppresses zero drift caused by RF interfercence, monthly zero drift ＜0.1%F.S.

Application areas

Semiconductor-Integrated Circuit

Clean energy - Photovoltaic

Specialty Industry - Vacuum Coating

Life Sciences - Analytical Instruments

Scientific Research - Experimental Equipment

Technical indicators

Model	VG200
Operating Temperature Range	15℃~40℃
Storage Temperature Range	-20℃~80℃
Storage Environment Humidity	≤95%

Performance Parameters

Accuracy	VG202 (without heating)	0.15% of reading 0.25% of reading 0.5% of reading
	VG204 (45℃)	≥1Torr 0.15% of reading < 1Torr 0.25% of reading
	VG210 (100℃)	≥1Torr 0.15% of reading < 1Torr 0.25% of reading
	VG215 (150℃)	0.5% of reading
	VG216 (160℃)	0.5% of reading
	VG220 (200℃)	0.5% of reading
Measurement Range	0.1 Torr ~ 1000 Torr
Resolution	0.001% (1X10 ^-5 ) of FS
Temperature Drift Coefficient (Zero)	≥1Torr 0.002% FS/℃ < 1Torr 0.005% FS/℃
Temperature Drift Coefficient (Span)	0.02% Reading/℃
Response Time	＞1Torr 20msec ≤1Torr 40msec
Heating Temperature	No heating, 45℃, 100℃, 150℃, 160℃, 200℃
Warm-up Time (Under 25℃ ambient temperature conditions)	4 hours
Withstand Voltage Limit	＞1Torr 45psia (310kpa) ≤1Torr 30psia (206kpa)

Electrical Parameters

Supply Voltage	±15V±10% VDC or ±15V±10% VDC or 24V±10% VDC
Output Signal	0-10V or 4-20mA
Electrical Interface	DB15 male、DeviceNet、Ethercat

VG Capacitive Thin Film Vacuum Gauge User Manual 20240926

2024-11-28