CS210 Thermal Digital Gas Mass Flow Controller-AURASKY

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CS210 Thermal Digital Gas Mass Flow Controller

The CS210 thermal digital gas mass flow controller is a digital-analog compatible thermal principle product, widely used in photovoltaic, fuel cell, vacuum and other industries to control gas flow in process manufacturing. It features high accuracy, high stability, and low zero drift.

Advantages

High precision, High Stability

Using signal processing chips with fast conversion rate, low temperature coefficient, strong common-mode rejection ratio, and low power consumption, the product features high precision, high stability, and high anti-interference performance. The accuracy can reach up to ±0.8%S.P.

Low Zero Drift

Using a low-power sensor based on the principle of constant power, combined with software and hardware temperature compensation functions, achieves low zero drift. Without correction, the zero point ≤0.5%F.S., the temperature coefficient is less than 0.02%F.S./℃ (zero), 0.05%F.S./℃ (span).

Perfect Functions

Features automatic reset, alarm, soft start, delay, etc., and is equipped with powerful free client software.

Innovation

Valve Control Technology of VCP

The valve control technology adopts a number of new achievements, collectively referred to as VCP technology. This structure has a small internal gas dead zone, fast valve response speed, and no hysteresis phenomenon. Using VCP technology can effectively improve the quality of gas mass flow controllers.

Constant Power Sensor

A novel constant-power sensor technology is adopted. This technology uses a method to maintain a constant operating state of the sensor, significantly improving multiple indicators such as system measurement accuracy and response speed.

Digital Sensor Compensation Technology

A digital sensor bridge balancing method is used, which can compensate for the sensor driving voltage with continuous voltage to improve the product sensor's suppression of temperature drift, enabling the product to withstand drastic temperature changes.

Application Areas

Semiconductor - Semiconductor Lighting

Special Industry - Petrochemical Industry

Specialty Industry - Optical Fiber

Special Industry - Vacuum Coating

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Bioengineering

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

Specifications

ITEM	CS210
Type	A		C		D
Flow Rate Specification (N₂)	(0~5,10,20,30,50,100,200,300,500) SCCM (0~1,2,3,5,10,20,30,50) SLM		(0~2,3,5,10,20,30,50,100,200,300,500) SCCM (0~1,2,3,5,10,20,30) SLM
Accuracy	Type: ±1.0% S.P.(≥35% F.S.); ±0.35% F.S.(<35% F.S.) Special; ±0.8% S.P.(≥35% F.S.); ±0.3% F.S.(<35% F.S.)
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤1sec		≤0.8 sec (SEMI E17-0600)
Valve Type	Normally Closed or Normally Open (F.S.≤30slm)	No Valve	Normally Closed or Normally Open	No Valve	Normally Closed or Normally Open	No Valve
Differential Pressure	0.05~0.35MPa (Flow≤10slm) 0.1~0.35MPa (10slm30slm)	<0.02MPa	(0.05~0.35)MPa(≤10slm) (0.1~0.35)MPa(>10slm)	<0.02MPa	(0.05~0.35)MPa(≤10slm) (0.1~0.35)MPa(>10slm)	<0.02MPa
Max. Operating Pressure	0.45MPa
Temperature Coefficient	Zero: ≤±0.05% F.S./℃; Span: ≤±0.1% F.S./℃ (Flow≤30slm) Span: ≤±0.2% F.S./℃ (Flow>30slm)		Zero: ≤±0.02% F.S./℃; Span: ≤±0.05% F.S./℃
Max Pressure	3MPa (435pisg)
Leak	1×10 ^-9atm·cc/sec He		1×10 ^-10atm·cc/sec He
Surface Finish	Viton		Metal (Stainless Steel V/V, 5Ra)		Metal
Seal Materials	——		Cr/Fe ratio > 2.0; CrO thickness > 20 Angstroms		——
Surface Finish	25 μinch Ra		10μinch Ra		25 μinch Ra
Operation Temperature	(5~45)℃		(0~50)℃
Input Signal	Digital: RS485 or EtherCAT Analog: 0~5V/4~20mA	N/A	Digital: RS485 or EtherCAT Analog: 0~5V/4~20mA	N/A	Digital: RS485 or EtherCAT Analog: 0~5V/4~20mA	N/A
Output Signal	Digital: RS485 or EtherCAT; Analog: 0~5V/4~20mA
Power Supply	±8~±16VDC (Bipolar); +20.4~+26.4 VDC (Single-ended)
Electronic Connector	9 pin male sub-D, 15 pin male sub-D, EtherCAT
Fittings	VCR1/4” M; VCO1/4” M; A-seal; Compression Fitting φ10; Compression Fitting φ6; Compression Fitting 3/8”; Compression Fitting 1/4”; Compression Fitting 1/8”; Compression Fitting φ3; φ6 (inner) × 1 hose; φ5 (inner) × 1.5 hose; φ4 (inner) × 1 hose;		VCR1/4” M; Compression Fitting φ6; Compression Fitting φ3; Compression Fitting 1/4”; W-seal; C-seal
Weight	1kg	0.8kg	1.2kg	1kg	1.2kg	1kg

Related Products

CS100 Thermal Digital Gas Mass Flow Controller

Clean Energy - Photovoltaic

Special Industry - Petrochemical Industry

Specialty Industry - Optical Fiber

Special Industry - Vacuum Coating

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

The CS100 product is developed based on the Huacheng Electronics CS series product technology platform. Building upon constant power sensor technology, digital sensor balancing technology, and VCP line control technology, it utilizes a customized design. Customers can select products that meet their specific needs. Its unique Customer Zero-Point Compensation (CGC) function solves the problem of inaccurate MFC precision caused by customer ground wire connections, allowing the product to better adapt to customer environments.

CS312 Thermal Digital Gas Mass Flow Controller

Semiconductor - Integrated Circuit

Semiconductor - Semiconductor Lighting

Special Industry - vacuum Coating

Scientific Research - Experimental Equipment

The CS312 mass flow controller utilizes a new low zero drift sensor and temperature compensation technology, achieving accuracy within 1% of the set value. Its low temperature coefficient ensures reliable performance across varying environmental temperatures. Designed for precision gas flow control in process equipment within semiconductor, photovoltaic, and flat panel display industries, this device offers exceptional features including minimal zero drift, high accuracy, rapid response, and corrosion resistance.

CS316 Thermal Digital Gas Mass Flow Controller

Semiconductor - Integrated Circuit

Clean Energy - Photovoltaic

The CS316 is a pressure-insensitive mass flow controller specifically designed for critical semiconductor manufacturing processes. It incorporates pressure compensation technology to mitigate the impact of upstream pressure variations on instantaneous flow, ensuring product stability and accuracy. All technical specifications strictly comply with SEMI standards, supporting W-type and C-type IGS gas panel.

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