CS312 Thermal Digital Gas Mass Flow Controller-AURASKY

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CS312 Thermal Digital Gas Mass Flow Controller

The CS312 mass flow controller utilizes a new low zero drift sensor and temperature compensation technology, achieving accuracy within 1% of the set value. Its low temperature coefficient ensures reliable performance across varying environmental temperatures. Designed for precision gas flow control in process equipment within semiconductor, photovoltaic, and flat panel display industries, this device offers exceptional features including minimal zero drift, high accuracy, rapid response, and corrosion resistance.

Advantages

Low Zero Drift

The new sensor employs constant power principle, with rapid temperature compensation to maintain thermal conduction equilibrium, effectively suppressing zero drift.

High Accuracy

The flow control accuracy achieves 1% S.P. through the application of set point accuracy.

Fast Response Time

Response time ≤0.8 sec, meeting customer process requirements.

Innovation

Constant Power Sensing Technology

The sensor uses a symmetrical design to maintain thermal conduction balance upstream and downstream, and uses high-performance insulation materials to effectively suppress zero drift.

Electrochemical Polishing Technology

Surface treatment was performed using electrochemical polishing, resulting in an internal surface roughness of 5μinch Ra for all mechanical components, exhibiting excellent corrosion resistance.

Application Areas

Semiconductor - Integrated Circuit

Semiconductor - Semiconductor Lighting

Special Industry - vacuum Coating

Scientific Research - Experimental Equipment

Specifications

ITEM	CS312
Full Scale Range (N₂)	(0~1,2,3,5,10,20,30,50,100,200,300,500) SCCM (0~1,2,3,5,10,20,30,50) SLM
Accuracy	±1.0% S.P. (≥35% F.S.) (±0.80% S.P. (≥30% F.S.) optional) ±0.35% F.S. (＜35% F.S.) (±0.24% F.S. (＜30% F.S.) optional)
Leak	≤5×10⁻¹² Pa·m³/s
Response Time	≤0.8 sec
Differential Pressure	0.05~0.35MPa flow rate specification ≤10SLM 0.15~0.35MPa 10SLM 0.30~0.50MPa 30SLM
Temperature Coefficient	Zero point: ≤±0.02%F.S./℃; Adjustment: ≤±0.05%F.S./℃
Repeatability	±0.2% F.S.
Linearity	±0.5% F.S.
Max Pressure	3.5MPa
Seal Materials	Metal Seal
Operating Temperature	(0~50) ℃
Input Signal	Analog: 0~5V, RS485, DeviceNet
Output Signal	Analog: 0~5V, RS485, DeviceNet
Power Supply	±8~±16 VDC (bipolar) or +14~+28 VDC (unipolar)
Fittings	VCR1/4 male connector; 1.125" C-type seal connector; 1.125" W-type seal connector

Related Products

CS330 Thermal Digital Gas Mass Flow Controller

Semiconductor - Integrated Circuit

Clean Energy - Photovoltaic

Special Industry - Vacuum Coating

Scientific Research - Experimental Equipment

The CS330C/D Series MFC are all-metal sealed, high-flow digital devices providing high accuracy (±0.8% reading) and reliability for gas mass flow control/measurement. Supporting digital signals, 0-5V analog, and 4-20mA analog outputs, they operate with dual power (±8~±16VDC) or single power (+14~+28VDC).

CS316 Thermal Digital Gas Mass Flow Controller

Semiconductor - Integrated Circuit

Clean Energy - Photovoltaic

The CS316 is a pressure-insensitive mass flow controller specifically designed for critical semiconductor manufacturing processes. It incorporates pressure compensation technology to mitigate the impact of upstream pressure variations on instantaneous flow, ensuring product stability and accuracy. All technical specifications strictly comply with SEMI standards, supporting W-type and C-type IGS gas panel.

CS312 Thermal Digital Gas Mass Flow Controller

Semiconductor - Integrated Circuit

Semiconductor - Semiconductor Lighting

Special Industry - vacuum Coating

Scientific Research - Experimental Equipment

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