CS100 Thermal Digital Gas Mass Flow Controller

The CS100 product is developed based on the Huacheng Electronics CS series product technology platform. Building upon constant power sensor technology, digital sensor balancing technology, and VCP line control technology, it utilizes a customized design. Customers can select products that meet their specific needs. Its unique Customer Zero-Point Compensation (CGC) function solves the problem of inaccurate MFC precision caused by customer ground wire connections, allowing the product to better adapt to customer environments.

Advantages

High Precision, High Stability

Using signal processing chips with fast conversion rate, low temperature coefficient, strong common-mode rejection ratio, and low power consumption, the product features high precision, high stability, and high anti-interference performance. The accuracy can reach up to ±0.8%S.P.

Low Zero Drift

Low-power sensors using a constant-power principle, combined with software and hardware temperature compensation, achieve low zero drift. Without correction, the zero point ≤0.5% F.S., the temperature coefficient is less than 0.02% F.S./℃ (zero), 0.05% F.S./℃ (span).

Perfect Functions

Features auto-reset, alarm, soft-start, and delay functions, and is equipped with powerful free client software.

Innovation

Valve Control Technology of VCP

The valve control technology adopts a number of new achievements, collectively referred to as VCP technology. This structure has a small internal gas dead zone, fast valve response speed, and no hysteresis phenomenon. Using VCP technology can effectively improve the quality of gas mass flow controllers.

Constant Power Sensor

A novel constant-power sensor technology is adopted. This technology uses a method to maintain a constant operating state of the sensor, significantly improving multiple indicators such as system measurement accuracy and response speed.

Digital Sensor Compensation Technology

A digital sensor bridge balancing method is used, which can compensate for the sensor driving voltage with continuous voltage to improve the product sensor's suppression of temperature drift, enabling the product to withstand drastic temperature changes.

Application Areas

Clean Energy - Photovoltaic

Special Industry - Petrochemical Industry

Specialty Industry - Optical Fiber

Special Industry - Vacuum Coating

Special Industry - Heat Treatment

Life Sciences - Environmental Protection

Life Sciences - Food Industry

Life Sciences - Healthcare

Scientific Research - Experimental Equipment

Specifications

ITEM CS100
CS100A CS100D
Accuracy ±1.0%S.P.(≥35%F.S.);±0.35%F.S.(<35%F.S.)
Linearity ±0.5%F.S.
Repeatability ±0.2%F.S.
Response Time ≤ 1sec
Valve Type Normally Closed N/A Normally Closed N/A
 Differential Pressure 

(0.05~0.35)MPa(≤10 SLM)

 

(0.1~0.35)MPa(10＜flow rate specification≤30SLM)

 

(0.25~0.45)MPa(30＜flow rate specification≤50SLM)

 <0.02 MPa

(0.05~0.35)MPa(≤10 SLM)

 

(0.1~0.35)MPa(10＜flow rate specification≤30SLM)

 <0.02 MPa
Temperature Coefficient  Zero:≤±0.05%F.S./℃; Span: ≤±0.1%F.S./℃
Max Pressure 0.45MPa
Pressure Resistance 3MPa 10MPa 3MPa 10MPa
Leak  1×10⁻⁹ Pa·m³/sec He(1×10⁻⁸atm· cc/sec He)
Sealing Materials Viton Metal
Operation  Temperature (5~45)℃
Input Signal

Analog:

 

(0~5)VDC

 Digital:RS485 N/A N/A

Analog:

 

(0~5)VDC

 Digital: RS485 N/A N/A
Output Signal

Analog:

 

(0~5)VDC

 Digital: RS485

Analog:

 

(0~5)VDC

 Digital: RS485

Analog:

 

(0~5)VDC

 Digital: RS485

Analog:

 

(0~5)VDC

 Digital: RS485
Electronic Connector

D sub 9

 

pins male;

 

D sub 15

 

pins male

D sub 9

 

pins male;

 

3 pin

 

male O

 D sub15 pins male

D sub 9

 

pins male;

 

D sub 15

 

pins male

D sub 9

 

pins male:

 

3 pin

 

male O

 D sub15 pins male

D sub 9

 

pins male;

 

D sub 15

 

pins male

D sub 9

 

pins male;

 

3 pin

 

male O

 D sub15 pins male

D sub 9

 

pins male;

 

D sub 15

 

pins male

D sub 9

 

pins male;

 

3 pin

 

male O

 D sub15 pins male
Power Supply ±15V ±15V +24V ±15V ±15V +24V ±15V ±15V +24V ±15V ±15V +24V
Auto Zero Support
Surface Finish 25 μinch Ra
Fittings

Compression Fittingφ6; Compression Fittingφ3;

 

Compression Fittingl/4"; Compression Fittingl/8";

 

VCR1/4"M:

 

φ6(inner)×1hose;φ5(inner)×1.5hose;φ4(inner)×1hose

 VCR1/4"M
Weight 1.2Kg 1Kg 1.2Kg 1Kg

 

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CS210 Thermal Digital Gas Mass Flow Controller

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Special Industry - Petrochemical Industry

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Life Sciences - Environmental Protection

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The CS210 thermal digital gas mass flow controller is a digital-analog compatible thermal principle product, widely used in photovoltaic, fuel cell, vacuum and other industries to control gas flow in process manufacturing. It features high accuracy, high stability, and low zero drift.

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