DS312 Pressure Type Gas Mass Flow Controller-AURASKY

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DS312 Pressure Type Gas Mass Flow Controller

The DS312 is a high-precision, fast-response mass flow controller (MFC) primarily used in semiconductor equipment such as etchers that demand high machine performance.

Advantages

High control precision

Accuracy up to ±1.0% S.P.(≥10%F.S.)

Fast response

Response time ≤ 0.5 sec

Low zero-drift phenomenon

Surface electrochemical polishing of deep blind holes and intersecting holes

Fully compliant with SEMI standards

Equipped with import pressure detection function

Innovation

Pressure sensing technology based on PTC (Pressure, Temperature, Channel)

P. Special customized sensing technology, reaching 0.1ms. T. Pressure (P)-Temperature (T) dual-parameter characteristic temperature compensation technology. C. Unique fluid channel design technology.

Novel piezoelectric valve structure principle technology

The piezoelectric valve uses a piezoelectric ceramic drive structure, which features high output driving force, high control precision, compact structure, low electromagnetic pollution, low power consumption, and fast response time.

High-precision piezoelectric valve drive technology

Utilizing a novel DC/DC controller and a unique BOOST topology, output ripple is effectively reduced, and power efficiency is improved.

Material surface treatment technology that fully meets SEMI requirements

a. All-metal sealed structure; materials in contact with gas are SEMI F20 UHP Compliant, Hastelloy C-22 (special gas optional); b. EP polishing technology; c. Microporous processing technology.

Application areas

Semiconductor Integrated Circuit

Semiconductor-MEMS

Power semiconductor

Compound semiconductor

Semiconductor—Advanced Packaging

Semiconductor display

Semiconductor lighting

Technical indicators

Model	DS312
Flow Rate Specification	50~10000 sccm (DS312C)
Flow Rate Specification	50~5000 sccm (DS312W)
Valve Type	Normally Closed
Inlet Pressure	240～450 kPaA, Flow Rate ≤5 SLM
Inlet Pressure	350～450 kPaA, Flow Rate >5 SLM
Outlet Pressure	≤3.3 kPaA (DS312C)
Outlet Pressure	≤13.3 kPaA (DS312W)
Maximum Pressure Resistance	1Mpa
Operating Temperature	10℃ ~ 45℃
External Leakage	1 x 10 ^-11 Pa·m³ / sec He
Accuracy (including linearity and calibration system accuracy, etc.)	≤ ±1%S.P. (≥10%F.S.)
Repeatability	≤ ±0.3%S.P. (≥10%F.S.)
Response Time (flow rate reaches ±2% of the set point)	≤ 0.5 sec
Standard Power Connector	DeviceNet Connector
Communication Protocol	DeviceNet
Standard Gas Path Connector	IGS-C, IGS-W
Material of Gas Inlet Part	F20

Note:

1. F.S.: Full Scale

2. kPaA: kPa, Absolute Pressure

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