2MHz pulsed RF power supply-AURASKY

Home

2MHz pulsed RF power supply

2MHz BGP series RF power supply, a pulse RF power supply, operating frequency range of 1.765 MHz～2.165 MHz with frequency selection function, 50Ω load, meets the output of 2500W, 5000W rated power, power accuracy ≤±1%, composed of power supply part, RF part and control part, cooling method is water cooling and air cooling.

Advantages

Rich and user-friendly control interface

Users can flexibly and conveniently operate the RF power supply through a variety of control communication interfaces, including a display touchscreen, analog interface, RS232/RS485 interface, DeviceNet, EtherCat, and Ethernet.

Control modes are diverse and flexible

Features multiple control modes, including forward power mode, load power mode, AP mode, and BVC mode (BGP), meeting the needs of those unfamiliar with process control.

With strong stability, consistency, and reliability

The RF power supply has harmonic distortion <-45dB, power accuracy of 1%, and power repeatability of 0.5%, demonstrating strong stability, consistency, and reliability.

Equipped with comprehensive self-diagnostic and protection functions

Consistency, harmonic, and stray small.

All-digital control platform

Dual-core control using FPGA+ARM, high-speed digital acquisition and digital control, achieving high-speed and high-precision real-time control of RF power supplies.

Innovation

Rich and flexible waveform control functions

Features waveform control functions such as continuous wave, single pulse, double pulse, and multi-pulse, and pulse synchronization/asynchronous functions between multiple RF power supplies.

AFT, DFT frequency sweeping technology

Features automatic AFT frequency sweeping technology, DFT dynamic frequency sweeping technology, and DFT frequency sweeping parameter self-learning technology, adapting to fast and high-precision frequency sweeping under complex load conditions.

Pulse swept frequency technology

Features pulse independent frequency sweeping technology, enabling the coordinated use of pulse control and frequency sweeping control to meet the independent frequency sweeping function of multiple pulses in advanced processes.

Application areas

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor display

Semiconductor-Microelectromechanical Systems

Power semiconductor

Compound semiconductor

Technical indicators

Product Model	BGP2502	BGP5002
Operating Frequency	(1.8-2.17MHz)± 0.005%
Frequency Mode	Fixed Frequency, Selectable Frequency, Frequency Sweep (AFT, DFT)
Pulse Mode	Master/Slave
Adjustment Mode	FWD, LOAD, AP
Output Power	2500W	5000W
Output Power Accuracy	≤±1% or 2.5W	≤±1% or 5W
Output Impedance	50Ω	50Ω
Supply Voltage	3-phase 208V±10% 50/60Hz
Output Interface	HN Female	7_16(Female)
Response Time	RF Response Time ≤100ms
Operating Mode	CW/Pulse/Dual Level/Multi Level（10Hz-20kHz、1%~99%）
Pulse Synchronization	Yes
Communication Interface	Analog port、RS232/485、DeviceNet、EtherCat、EtherNet
Harmonic Suppression	≤－45dBc	≤－45dBc
Cooling Method	Water Cooling + Air Cooling	Water Cooling + Air Cooling
RAMP Function	Yes