RPS power supply (BRT series) products-AURASKY

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RPS power supply (BRT series) products

The RPS power supply is a small radio frequency power supply specifically designed for the semiconductor field, widely used in oxide and nitride cleaning processes. The RPS power supply uses analog system control and can adjust power output via a self-tuning system. Output power is collected in the form of current feedback. The power supply has a built-in power output interface that can stably output a high-voltage sine wave of 48KHz-92KHz and maintain plasma stability.

Advantages

High precision

Capable of high-precision current output.

High voltage

It has an extremely high starting voltage capability and a high voltage stable output capability.

Innovation

Equipped with current control function

Fast and stable current closed-loop control system.

Equipped with output current monitoring function

Real-time monitoring of output current is achieved through a high-precision Hall sensor and an RMS detection system.

Equipped with interlocking function

Reliable integrated interlock system.

Application areas

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor display

Semiconductor lighting

Semiconductor-Microelectromechanical Systems

Power semiconductor

Compound semiconductor

Technical indicators

Model	BRT0150L	BRT0150LC
Power Input	220V±10%，50/60Hz
Output Type	Sine Wave
Output Frequency	48KHz-92KHz
Input/Output Isolation	>500M
Output Power Accuracy	2W or 2%
Output Current	300mA max
Interlock Adjustment	Non-adjustable	Adjustable