Single Output Matcher-AURASKY

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Single Output Matcher

A radio frequency (RF) matcher is a device used to match the impedance of the load with the impedance of the RF power source, reducing reflected power and maximizing transmitted power. Different matchers are designed to be suitable for single frequencies or multiple frequency bands to meet different application scenarios.

Advantages

Achieve precise matching of various pulse signals

Compatible with continuous wave and pulsed wave RF signal matching functions, it can achieve fast and accurate matching of single-stage pulsed signals, two-stage pulsed signals, and multi-stage pulsed signals, and is used in advanced process technology.

Suitable for applications with a wide range of machine impedance.

Customizable models covering frequencies from 400kHz to 60MHz and power from 10W to 45kW, encompassing impedance ranges for various applications from low frequency to very high frequency. Applicable in various processes including etching, thin film deposition, atomic layer deposition, atomic layer etching, and resist removal.

High-precision and fast matching

Using high-speed signal sampling sensor modules and advanced matching algorithms, high-precision and fast matching of load impedance is achieved, meeting customer requirements for various functional and performance indicators, especially with extensive application experience in consistency and reliability.

Innovation

Global high-speed matching algorithm

A unique algorithm suitable for various existing frequency matchers, capable of optimizing matching paths and achieving high-speed matching.

High-speed adaptive motor drive system

Specially optimized motor drive mode, adaptive full-speed regulation, realizing high-speed and stable operation.

Intelligent Signal Sampling and Control System

Under the premise of stable voltage and current, intelligent signal sampling significantly reduces sampling errors and, in conjunction with the control system, effectively improves matching accuracy.

Application areas

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor display

Semiconductor lighting

Semiconductor-Microelectromechanical Systems

Power semiconductor

Technical indicators

Power Range	5W-10kW
Frequency Range	400kHz±10% /2MHz±10% /13.56MHz±5% /27.12MHz±5% /40.68M±5% /60MHz±5%
Matching Speed	≤1s (Suitable Preset) or 3s
Matching Accuracy	≤1%* Forward Power or 5W
Signal Type	Continuous wave, pulsed wave (SLP/DLP/MLP)
Communication Interface	RS232/EtherCAT
Supply Voltage	24V DC
Cooling Type	Forced Air Cooling
Impedance Range	Customized according to customer needs
Mechanical Dimensions	Customized according to customer needs
Interface Type	Customized according to customer needs
Application Products	Etch, PVD, PECVD, MCVD, HDPCVD, PEALD