13MHz continuous wave RF power supply-AURASKY

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13MHz continuous wave RF power supply

A radio frequency (RF) power supply is a power supply device capable of generating sinusoidal waves or pulsed voltages at a fixed frequency within the RF range, with a certain power output capability. The 13MHz BG series RF power supply operates at a frequency of 13.56MHz and can output a rated power range of 1000W~5500W.

Advantages

Small size, high power density

The compact half-rack design and optimized water-cooling system provide a lightweight and user-friendly experience. The higher RF output capability and power accuracy provide a solid foundation for the next generation of processes.

Higher stability and consistency

Under 50Q and non-500 loads, excellent feed power accuracy and control performance are achieved. Combined with excellent repeatability, this ensures process stability.

Highly applicable

Suitable for various etching, deposition, ion implantation and other process equipment. The hardware interface has strong versatility and supports RS232, RS485, and EtherCAT communication methods.

Software upgrade capability

Features a complete alarm system, data logging capabilities, and a wealth of functions, backed by a strong software development team that can customize and upgrade new features to meet various needs.

Innovation

CEX function

Two or more power supplies can be locked to output to the same plasma at the same frequency and maintain a fixed phase relationship. This feature can mitigate crosstalk and eliminate related issues.

Frequency Selection/Scanning Function

Supports fixed-frequency output with a bandwidth of 13.56MHz±5%, with optional frequency tuning and automatic frequency sweeping for millisecond-level impedance matching.

HALO function

Optional HALO (High Accuracy, Low Output) supports 5W~30W power output, with power resolution supporting 0.1W.

Ramp function

The power ramp-up/ramp-down speed can be set, and the precise power control meets the needs of different process procedures.

Application areas

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor display

Semiconductor lighting

Semiconductor-Microelectromechanical Systems

Power semiconductor

Compound semiconductor

Technical indicators

Product Model	BG1013	BG1513	BG3013	BG3013-F	BG5513
Power Range	5-1000W	5~1500W	30-3000W		55W~5500W
Frequency	13.56MHz±0.005%
Power Requirements	Three-phase 187~239VAC，47~63Hz			Three-phase 408~552VAC，47~63Hz	Three-phase 208VAC，50/60Hz；
Does it support pulse function?	No
CEX	Supported
Output Impedance	50Ω
Output Accuracy	≤±1%			≤±1% or ±1.5W
Cooling Method	Water cooling NPT 3/8 inner thread			Water cooling 1/4NPT connector + air cooling	Water cooling NPT 3/8 inner thread；
Power Connector	Harting Type Han Q（pin）		Aviation connector XCD36F4Z1D1（pin）	Harting HAN Modular 40A series	Harting connector socket HB74140022601X2;
Output Connector	HN FEMALE				7/16 FEMALE；
Dimensions (L×W×H)	430×216×132.5		440.5×216×132.5	447.5×482.6×132.5	464.4×216×132.5
Communication Method	Communication method RS232、25pin analog			RS232、Analog（15 pin female）、DeviceNet	Communication method RS232、25pin analog