Unipolar series ESC DC power supply-AURASKY

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Unipolar series ESC DC power supply

ESC DC Power, or ESC direct current power supply, is a DC high-voltage electrostatic power supply specifically designed for electrostatic chucks (ESC). This product is a single-pole output power supply that can simultaneously provide positive and negative DC voltages. It connects to the DC electrodes of the electrostatic chuck via a dedicated cable and filter circuit, providing the high DC voltage required for the electrostatic chuck to generate suction.

Advantages

Wide range, high precision

A wide range of output voltages are available to meet different voltage requirements; output voltage accuracy can be as high as ±1%S.P.

Low ripple

Low voltage ripple means stable output voltage and strong anti-interference ability, providing a more stable DC power supply for the electrostatic chuck.

Multiple input controls are optional

Touchscreen control, 25pin IO, RS232, EtherCAT, etc.

Innovation

Equipped with polarity reversal and discharge functions

It can achieve polarity reversal of single-pole/double-pole output voltage; built-in automatic discharge circuit can quickly and safely release the remaining charge on the electrostatic chuck.

With monitoring function

It can monitor the output voltage and output current, and provide real-time feedback via analog or digital signals to ensure that specific process requirements are met.

Equipped with output protection mechanism

Equipped with overvoltage protection, the output will be turned off if the output voltage exceeds the set value by 10%; it also has overcurrent protection, and the current limit value can be set through the control terminal; the output will be turned off if the output current exceeds the set value by 10%.

Application areas

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor display

Semiconductor lighting

Technical indicators

Model

BE0400

Power Input

24VDC, 1A;

Output Voltage

Single pole 4000Vdc

Output Current

0~10：0~2mA max

Output Voltage Linearity Error

30Vdc~+4000Vdc, within 1%; -30Vdc~-4000Vdc, within 1%

Communication Method

Manual, 25pin I/O, RS232

CT(Center-Tap)

None

Ground Isolation

>10MΩ

Input/Output Isolation

>500MΩ

Polarity Reversal

Supported

Discharge Function

During discharge, the HV+ or HV- terminal to ground resistance is 200kΩ±5%

Protection Mechanism

Overvoltage protection with adjustable current limit