Bipolar series ESC DC power supply-AURASKY

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Bipolar series ESC DC power supply

ESC DC Power, or ESC direct current power supply, is a DC high-voltage electrostatic power supply specifically designed for electrostatic chucks (ESC). This product is a bipolar output power supply that can simultaneously provide positive and negative DC voltages. It connects to the DC electrodes of the electrostatic chuck via a special cable and filter circuit, providing the high DC voltage required for the electrostatic chuck to generate suction.

Advantages

Wide range, high precision, high offset

A variety of output voltage ranges are available to meet different voltage requirements; output voltage accuracy can be as high as ±1%S.P; bias voltage up to 2000V can be set/detected.

Low ripple

Low voltage ripple means stable output voltage and strong anti-interference ability, providing a more stable DC power supply for the electrostatic chuck.

Multiple input controls are optional

Touchscreen control, 25pin IO, RS232, EtherCAT, etc.

Innovation

Equipped with polarity reversal and discharge functions

It can achieve polarity reversal of single-pole/double-pole output voltage; built-in automatic discharge circuit can quickly and safely release the remaining charge on the electrostatic chuck.

With monitoring function

It can monitor the output voltage, output current, and input bias (CT), and provide real-time feedback through analog or digital signals to ensure that specific process requirements are met.

Equipped with output protection mechanism

Equipped with overvoltage protection, the output will be turned off if the output voltage exceeds the set value by 10%; it also has overcurrent protection, and the current limit value can be set through the control terminal; the output will be turned off if the output current exceeds the set value by 10%.

Application areas

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor display

Semiconductor lighting

Technical indicators

Model	BEC0402	BEC0301	BE1200/BEC1200
Power Input	24VDC, 1A		24VDC, 2A
Output Voltage	0~±2000Vdc (4000Vdc)	0~±1500Vdc (3000Vdc)	0~±6000Vdc (12000Vdc)
Output Voltage Accuracy	Within 1% of set point for set values between 1000Vdc and 4000Vdc For set values <1000Vdc, error = set value ±10Vdc	Within 1% of set point for set values between 1000Vdc and 3000Vdc; For set values <1000Vdc, error = set value ±10Vdc;	Within 1% of set point for set values between 1000Vdc and 12000Vdc
Output Current	0~10V: 0~2mA max		0~10V: 0~1mA max
Output Voltage Linearity Error	Within 1% for 30Vdc-4000Vdc	Within 1% for 30Vdc-3000Vdc	Within 1% for 1000Vdc-12000Vdc
Communication Method	Manual, 25pin I/O, RS232
CT (Center-Tap)	Detectable/Settable, 0-10V: 0Vdc~-2000Vdc	Detectable/Settable, 5-10V: -1000Vdc~+1000Vdc	None
Other Notes	Upgraded dual bipolar serial port settings CT function	Upgraded Features (1) Added VR+/VR- commands: Allow/disable polarity reversal mode (2) Added SCT command: Set CT value (3) Added current limiting and voltage holding function	BEC1200 supports dual positive and dual negative functions
HV Ground Isolation	>10M
Input/Output Isolation	>500M
Polarity Reversal	Supported
Discharge Function	Supported
Protection Mechanism	Overvoltage protection, overcurrent protection