13MHz pulsed RF power supply-AURASKY

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13MHz pulsed RF power supply

An RF power supply is a power supply device capable of generating sinusoidal waves or pulsed voltages at a fixed frequency, operating within the radio frequency range, and possessing a certain power output capability. The 13MHz BGP series RF power supply operates at a frequency of 13.56MHz and can output a rated power range of 1500W~6000W.

Advantages

Small size, high power density

The compact half-rack design and optimized water-cooling system provide a lightweight and user-friendly experience. The higher RF output capability and power accuracy provide a solid foundation for the next generation of processes.

Higher stability and consistency

Under 50Q and non-500 loads, excellent feed power accuracy and control performance are achieved. Combined with excellent repeatability, this ensures process stability.

Highly applicable

Suitable for various etching, deposition, ion implantation and other process equipment. The hardware interface has strong versatility and supports RS232, RS485, and EtherCAT communication methods.

Software upgrade capability

Features a complete alarm system, data logging capabilities, and a wealth of functions, backed by a strong software development team that can customize and upgrade new features to meet various needs.

Innovation

CEX function

Two or more power supplies can be locked to output to the same plasma at the same frequency and maintain a fixed phase relationship. This feature can mitigate crosstalk and eliminate related issues.

Frequency Selection/Scanning Function

Supports fixed-frequency output with a bandwidth of 13.56MHz±5%, with optional frequency tuning and automatic frequency sweeping for millisecond-level impedance matching.

HALO function

Optional HALO (High Accuracy, Low Output) supports 5W~30W power output, with power resolution supporting 0.1W.

Dual-Level Function

The pulse function has been upgraded to dual-level to meet the etching needs of high aspect ratio (HAR) in more advanced processes.

Ramp function

The power ramp-up/ramp-down speed can be set, and the precise power control meets the needs of different process procedures.

Application areas

Semiconductor-Integrated Circuit

Semiconductor-Advanced Packaging

Semiconductor display

Semiconductor lighting

Semiconductor-Microelectromechanical Systems

Power semiconductor

Compound semiconductor

Technical indicators

Technical Parameters	BGP1513	BGP3013	BGP6013
Power Range	15W~1500W	30W~3000W	60W~6000W
Frequency	13.56MHz
Power Requirements	Three-phase 208V, 50/60Hz AC input
Pulse Function Support	Supported
Output Impedance	50Ω
Output Accuracy	Power Accuracy: ≤3W; Frequency Accuracy: ±0.005%;		Power Accuracy ≤6W; Frequency Accuracy ±0.005%;
Cooling Method	Air cooling + water cooling 3/8" NPT cooling water interface;
Power Connector	harting
Output Connector	HN(Female)
Power Supply Dimensions	half rack		full rack
Communication Interface	RS232、RS485、EtherCAT