FV100 Vaporizer-AURASKY

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FV100 Vaporizer

The FV100 vaporizer is a device that atomizes a precursor liquid into a droplet aerosol, which then flows into a high-efficiency heat exchanger to form steam. It provides a high-purity gas or vapor mixture that is essentially free of particulate contaminants, used in CVD, PECVD, and ALD thin film deposition for semiconductor thin film deposition and industrial coating applications.

Advantages

Low weight, small size

The product weighs only 1.3kg, with a maximum height of 177mm and a maximum width of 56mm, allowing for installation in confined spaces and saving machine space.

High vaporization efficiency

It can achieve 100% vaporization efficiency and can stably and efficiently output gas.

Device maintenance-free

The clever structural design reduces later maintenance costs.

Customizable

Applicable to various process precursors (TEOS/TEPO/TEB/H20 .etc.), the vaporizer can be customized according to customer's different flow and temperature requirements.

Innovation

High vaporization efficiency

Can achieve 100% vaporization efficiency and stable and efficient gas output.

Save space

The product is up to 177mm high and 56mm wide at its widest point.

Semiconductor-Integrated Circuit

Model	FV100	Type
Dimensions	mm×mm×mm	Size
Weight	1.3kg	Weight
Connector	Inlet: 1/4”VCR; Liquid inlet: 1/8”VCR×2；Outlet: 1/2”VCR	Joint
Material	316L	Material
Leak Rate	<1×10-8 scc/sec Helium	Leak Rate
Heater Specifications	208 VAC, 60Hz, 400W	Heater
Carrier Gas	Inert Gas	Carrier gas
Liquid Flow Range	0-10g/min(TEOS)	Flow Range
Maximum System Pressure	1.0MPa	Position resolution
Temperature Sensor Type	Type K Thermocouple	Temperature Sensor
Installation Position	any	Mounting Position
Maximum Pressure Resistance	1.0 Mpa	Pressure Resistance