VD-03 Diffuser-AURASKY

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VD-03 Diffuser

The VD-03 diffuser uses a metal porous material filter element fabricated by powder metallurgy. The numerous micron-level channels formed during the sintering process enable gas homogenization and laminar flow, ensuring gas permeability and achieving a shorter vent-up time. At the same time, this microstructure enhances the adsorption and diffusion filtration effects on submicron particles, with the ability to filter particles as small as 0.0015μm. The diffuser housing can be made of 316L VV material with EP treatment, further improving the diffuser's corrosion resistance. A unique welding process ensures a strong bond between the porous material filter element and the housing, resulting in a high-strength diffuser overall.

Advantages

Strong R&D capabilities

Possesses a product development team with a reasonable educational background and rich experience, and has extensive cooperation with multiple universities and enterprises.

Clean production environment conforming to SEMI standards

Cleaning, assembly, and testing are all performed in a Class 100 cleanroom, effectively ensuring product cleanliness.

A complete testing system

Hua Cheng possesses a variety of advanced testing instruments and relies on third-party institutions to conduct product performance tests, ensuring that product indicators are accurate and reliable.

Innovation

The perfect balance between low air resistance and high-efficiency filtration

A specially developed powder metallurgy process produces a diffuser that ensures gas permeability while effectively filtering submicron particulate matter.

Welding of micro-arc porous materials

Advanced micro-arc automatic welding technology is used to prevent defects such as oxidation, discoloration, and lack of fusion, improving the structural strength of the diffuser.

Provide customized solutions

Customization options are available for aspects such as connection methods, housing and filter element materials, and surface roughness, according to customer requirements.

Application areas

Semiconductor Integrated Circuit

Semiconductor lighting

Technical indicators

Performance	Indicators
Vent Efficiency	At 20psig, ~0.5sec/L
Particle Shedding	According to SEMI F43, particles above background (<1 particle/ft3)
Filtration Accuracy	0.0015μm
Filter Material	316L
Housing Material	316L or 316L VV★Optional
Wetted Surface Finish	Ra0.2μm (10Ra) or Ra0.1μm (5Ra) Optional
Inlet Port	¼” Male Swivel VCR (External Thread)
Outlet Port	ISO NW50
O-ring Material	Viton
End Face Annular Seal Groove	Outer diameter 68.5mm × Inner diameter 60.5mm × Depth 2.6mm
Maximum Operating Temperature	460°C under inert atmosphere (metal only); 100°C (including O-ring)
Maximum Operating Pressure	60psig (4.1barg)
Maximum Operating Pressure Differential	75psid (5.2bar)
Structural Features	The diffuser is a welded structure, with high structural strength and few particles
Service Life	3 million cycles

Note: Inlet and outlet port types, diffuser size, and filter material can be customized according to customer requirements;

Note ★: 316L VV refers to high-purity 316L stainless steel using VIM+VAR double vacuum smelting technology, with high corrosion resistance.