Covering Radio frequency power supply 、 Matcher 、 Radio frequency sensor and DC/Low-Frequency Power Supply Core products include RF power supplies with operating frequencies ranging from 400 kHz to 13.56 MHz and power levels from 5 W to 45 kW, tailored to meet diverse application requirements; matching networks are available in single‑output, dual‑output, and multi‑frequency configurations, offering flexible solutions to accommodate various process needs. Radio frequency sensor It enables real-time monitoring of the reaction chamber’s voltage, current, impedance, and phase, providing stable process control and fault diagnosis for semiconductor manufacturing equipment. The ESC DC power supply is specifically designed for electrostatic chucks, delivering up to 15 kV (±7.5 kV) with both bipolar and unipolar output options, and is compatible with a wide range of electrostatic chucks. 
 

including Gas mass flow controller (including pressure-type, digital, and analog types), Liquid flow controller 、 Flow Ratio Controller These products combine high precision, high reliability, low zero drift, corrosion resistance, and fast response, enabling precise control of gas and liquid flow rates to meet the demanding flow‑control requirements of harsh process environments. 
 

Launch Gas pressure controller 、 Capacitive薄膜 vacuum gauge 、 Pressure transmitter 、 Liquid pressure sensor 、 Butterfly valve and also Poppet valve These products can provide stable and reliable pressure-control solutions for the high-end manufacturing sector, ensuring process stability. 
 

By seamlessly integrating gas/liquid circuit design, precision machining, and system‑level testing capabilities, and leveraging extensive expertise in flow‑rate and vacuum measurement and control, we can deliver customized solutions to our customers. In addition, we offer comprehensive gas/liquid circuit system solutions in three configurations—IGS, VCR, and ferrule‑type—tailored to meet the specific requirements of diverse applications. 
 

It encompasses core products such as the wafer storage system (Stocker) for vertical furnace tube equipment and the wafer transport system (WTS) for cleaning equipment, as well as front-end modules (EFEM) and wafer transport platforms (WTM) for etching and deposition tools, enabling precise, efficient, and damage-free wafer handling to support the advancement of semiconductor manufacturing processes.