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IGS Gas Panel

The IGS gas panel is a new gas delivery system solution developed specifically for the semiconductor field. It adopts a gas straight-direction transportation design, is compact, easy to install and maintain, and meets the needs of miniaturization of components. With years of R&D experience, AURASKY offers the IGS gas panel with the characteristics of excellent sealing performance, high precision and high integration, and relies on special gas laboratories to ensure the high accuracy of special gas control, which is also the future development direction of IGS gas panel.

Advantages

Competencies in IGS Design

Customized product development for multiple semiconductor clients, accumulating extensive experience in IGS block device assembly design and selection.

Full Component Solutions

Optimize pneumatic component selection based on customer needs and ensure continuous supply.

High-purity welding capability

Built according to SEMI and ASTM standards, it can meet the needs of high-purity semiconductor-grade welding.

Innovation

Achieve multiple controls of fluids in the equipment process pipeline, including transportation, mixing, filtration, diversion, and flow control.

Provide safety assurance for the operation of various special gases in the equipment process pipeline

Using high-purity components, a super-clean environment is provided for the chamber and vacuum lines in a controllable environment.

Application Areas

Semiconductor lighting

Semiconductor Integrated Circuit

Technical indicators

ITEM	Standard
Spare parts inbound inspection	Shape and size consistent with drawings, actual model consistent with parts list model
Installation standard	The flow direction and installation position of each valve and instrument are consistent with the drawing requirements, and the pipeline is smooth
Pressure holding	12-hour pressure drop ≤1%
Leakage rate	≤1×10 ^-10 Pa·m³/S
Particle size	Three consecutive tests, the number of particles below 0.1um ≤3
Moisture	≤10ppb
Oxygen content	≤10ppb
Welding standard	No obvious weld scar, the surface of the welding part is free from scratches, dirt, and burn marks are completely removed
Welding standard	Weld bead deviation is less than 20% of the wall thickness, the weld bead is uniform and straight, and there is no obvious convexity, concavity, or misalignment
Appearance standard	Clean appearance, no obvious scratches in each part
	Component labels, interface methods, etc., are consistent with the drawings
	Visual inspection of the gas holder for corrosion, fogging or discoloration

Related Products

VCR Gas Panel

Semiconductor Integrated Circuit

Semiconductor lighting

Clean energy - Photovoltaic

Specialty Industry - Optical Fiber

Special industry - vacuum coating

Life Sciences - Analytical Instruments

Scientific Research - Experimental Equipment

The VCR gas panel primarily adopts the VCR sealing method. The integrated system is composed of components such as diaphragm valves, pressure regulators, pressure sensors, filters, MFCs (Mass Flow Controllers), and stainless steel pipe fittings. It offers flexible solutions tailored to meet diverse customer requirements.

If you have any questions, please leave your detailed requirements information here, and we will be happy to serve you.

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