VCR Gas Panel
Advantages
Competencies in VCR Design
Full Component Solutions
High-purity welding capability
Innovation
In the equipment process pipeline, the conveyance, mixing, debugging, and control (including switching, pressure reduction, filtration, diversion, and flow control, etc.) of fluids are realized.
Safety measures during gas mixing in equipment process pipelines.
Device customer process design solutions.
Application areas
Semiconductor Integrated Circuit
Semiconductor lighting
Clean energy - Photovoltaic
Specialty Industry - Optical Fiber
Special industry - vacuum coating
Life Sciences - Analytical Instruments
Scientific Research - Experimental Equipment
Technical indicators
| ITEM | Standard |
| Spare parts inbound inspection | Shape and size consistent with drawings, actual model consistent with parts list model |
| Installation standard | The flow direction, installation position of each valve and instrument are consistent with the drawing requirements, and the pipeline is smooth |
| Pressure holding | 12-hour pressure drop ≤1% |
| Leak | ≤1×10 -10 Pa·m³/S |
| Welding standard | No obvious weld scar, the surface of the welding part is free of scratches, dirt, and burn marks are completely removed |
| Weld bead deviation is less than 20% of the wall thickness, the weld bead is uniform and straight, without obvious convexity, concavity, or misalignment | |
| Appearance standard | Clean appearance, no obvious scratches on any parts |
| Component labels, interface methods, etc., are consistent with the drawings | |
| Visual inspection of the gas holder interior for corrosion, fogging, or discoloration |
Related Products
Semiconductor lighting
Semiconductor Integrated Circuit
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