Fluid control utilizes various control modules to accurately control key specifications such as fluid flow, pressure and vacuum to meet the specific process needs in the industrial field. With more than 40-Year development on the field of fluid control, AURASKY has developed a series of products such as gas mass flow controllers, pressure controllers,capacitive diaphragm gauges, vacuum switches, pressure sensors, differential pressure pauges, liquid pressure transducers, mixing vaporizers and gas panels. These products play a vital role in many fields such as IC, photovoltaics, vacuum coating and scientific research.

RF Control & Measurement products, including RF Generator, Match, VI Sensor, and DC/LF Power Supply, are designed to achieve precise plasma control through delivering stable RF energy for semiconductor manufacturing process (etching, thin-film deposition, etc.). With years of dedicated to RF Products R&D, AURASKY provides a comprehensive RF Control & Measurement product portfolio and supports customized configurations to meet specific application requirements.

Wafer transfer is achieved through an intelligent motion control system, ensuring reliable wafer transport and storage. Advanced scheduling management, particle control, and vibration suppression technologies enable high-yield wafer transfer control.AURASKY develops and manufactures wafer transfer products capable of stable single-wafer and batch transfer in both atmospheric and vacuum environments. Currently, our developed and produced wafer transfer system (WTS) for cleaning equipment, wafer storage system for vertical furnaces, wafer transfer module (WTM) for etching and deposition equipment, and equipment front end module (EFEM) for etching and deposition equipment have been successfully deployed in mass production at multiple client sites in the semiconductor and broader semiconductor industries.