300mm (nitrogen) wafer cassette transport and storage system-AURASKY

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300mm (nitrogen) wafer cassette transport and storage system

The 300mm (nitrogen) wafer cassette transfer and storage system mainly consists of a wafer cassette FOUP loading system LoadPort, a wafer cassette FOUP storage shelf, a robot, a fully sealed FIMS, a nitrogen purge system N ₂ Purge, pneumatic system, and electrical control system, etc. It realizes the loading and unloading, temporary storage, nitrogen purge, and wafer cassette FOUP switching functions. The wafer cassette FOUP loading system in this product is divided into two stations A/B, used to realize the loading and unloading of wafer cassette FOUPs. The wafer cassette FOUP storage shelf has a total of 18 stations, which can store multiple wafer cassette FOUPs. During storage, the nitrogen purge system N ₂ Purge function is enabled, which can effectively reduce the oxygen content and humidity inside the wafer cassette FOUP. The robot is used for picking, placing, and handling between stations. The fully sealed FIMS can realize the wafer cassette FOUP switching function and ensure the sealing requirements between the stocker and the process equipment.

Advantages

Nitrogen purge

Nitrogen purging is performed during the temporary storage of FOUP wafer boxes to reduce the oxygen content and humidity in the FOUP wafer boxes, improve the cleanliness inside the FOUP wafer boxes, reduce the full-seal FIMS purge time, and improve equipment cycle time.

Multi-position storage

It can realize the temporary storage of multiple wafer boxes FOUP, to a greater extent meet the actual production needs.

Full process particle control

Throughout the entire process of robotic pick-and-place, temporary storage on shelves, and fully sealed FIMS switch box operations, complete particle control is implemented to ensure the product meets higher process requirements.

Strong compatibility

This product is suitable for various models of FOUPs from different brands and is compatible with different product types.

Innovation

High automation efficiency

It can achieve fully automated production and unmanned operation, effectively avoiding interference from human factors.

Fully sealed FIMS

Innovative structural form, stricter control of particles, a unique product in China.

N ₂ Purge system

N during wafer box storage ₂ The Purge function improves production efficiency and reduces particles in the environment, meeting the needs of more advanced processes.

Application areas

Semiconductor Integrated Circuit

Semiconductor—Advanced Packaging

Semiconductor display

Power semiconductor

Compound semiconductor

Photovoltaic

Technical indicators

Vibration Value	≤0.3g
Particle Index	＜10ea@0.02μm, ＜3ea@0.5μm
Shelf Nitrogen Purge	At a flow rate of 15L/min, the oxygen concentration inside the FOUP box stored on the Shelf is reduced to ≤1%, and the humidity is reduced to ≤10% within 5 minutes.
FIMS Nitrogen Purge	At a flow rate of 80L/min, the oxygen concentration inside the FOUP is reduced to ≤50ppm within 4 minutes.

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